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Onto Innovation Inc. 2025-2026 Proxy Voting Records

Compiled from SEC Form N-PX filings and Onto Innovation Inc.’s Form 8-K, filed 2026-05-20 (Item 5.07 on EDGAR). Page generated 02 October 2026.

  • 10Reported items
  • 536Asset managers
  • 6,003Fund votes
  • 2026-05-20Meeting date

Proxy season: 2023-2024 2024-2025 2025-2026

Explore Onto Innovation Inc. in the interactive database Compare manager voting policies

Official 2025-2026 meeting results reported by Onto Innovation Inc.

These tallies are Onto Innovation Inc.’s own, as disclosed to the U.S. Securities and Exchange Commission on Form 8-K, filed 2026-05-20 (Item 5.07, “Submission of Matters to a Vote of Security Holders”). They cover every share voted at the meeting, not just the funds that file Form N-PX.

Onto Innovation Inc. — official shareholder meeting results, meeting held 2026-05-20
Ballot itemForAgainst AbstainWithheldBroker non-votesOutcome
Elect Director: Stephen D. Kelley 41,519,539447,69454,464 --2,682,384 Majority: yes
Elect Director: Susan D. Lynch 41,705,037262,19054,470 --2,682,384 Majority: yes
Elect Director: David B. Miller 38,775,5563,185,10761,034 --2,682,384 Majority: yes
Elect Director: Michael P. Plisinski 41,724,970280,58316,144 --2,682,384 Majority: yes
Elect Director: Stephen S. Schwartz 41,523,952444,09153,654 --2,682,384 Majority: yes
Elect Director: Christopher A. Seams 40,522,0141,479,45020,233 --2,682,384 Majority: yes
Elect Director: May Su 41,056,051904,11961,527 --2,682,384 Majority: yes
Proposal 2: The stockholders approved, on an advisory (non-binding) basis, the compensation for the Company's named executive officers, as disclosed in the Company's proxy statement for the 2025 Annual Meeting, by the following vote: 40,624,0221,196,481201,194 --2,682,384 Majority: yes
Proposal 3: The stockholders ratified Ernst & Young LLP as the Company's independent registered public accounting firm for the fiscal year ending December 31, 2026, by the following vote: 44,378,549178,157147,375 --0 Majority: yes

Source: Onto Innovation Inc., Form 8-K, filed with the SEC on 2026-05-20 — read the filing on EDGAR.

How asset managers voted at the Onto Innovation Inc. 2025-2026 meeting

Each item below shows how the 536 asset managers that disclosed a Onto Innovation Inc. vote in their SEC Form N-PX filings actually voted. Share totals are the shares those managers' funds voted, summed across every fund they report. These are reported items, not a count of the ballot: fund filings describe one ballot item in different words. Two descriptions are shown as one item only on evidence — the same text (or one cut short of the other), the same director nominee, or a match to the same row of Onto Innovation Inc.’s own Form 8-K tally — never because they merely read alike. A description that could not be joined that way is listed on its own, so one ballot item can appear more than once.

1. To approve, on an advisory (non-binding) basis, the compensation of our named executive officers as disclosed in the proxy statement; and

SECTION 14A SAY-ON-PAY VOTESMajority of the votes cast: yes

Combines 15 wordings of this item as funds reported it.

97% Majority: yes · of votes cast

FOR 97%
FOR: 40,624,022AGAINST: 1,196,481

Onto Innovation Inc.’s own tally for this item (“Proposal 2: The stockholders approved, on an advisory (non-binding) basis, the compensation for the Company's named executive officers, as disclosed in the Company's proxy statement for the 2025 Annual Meeting, by the fo”): 40,624,022 for, 1,196,481 against, per its Form 8-K filed 2026-05-20 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item. Of all 49,744,000 outstanding shares: 82% for, 2% against (84% of the company cast a for/against vote).

The 533 asset managers below cast 98% of the shares they voted on this item FOR. Fund share totals are not shown for this item: fund-reported shares overlap across filings (an adviser and the funds it manages can each report the same shares), and here their sum exceeds the total votes cast at the meeting.

FOR 98%
FOR: 97.8%AGAINST: 1.9%ABSTAIN: 0.3%NOT VOTED: 0.0%
Largest asset managers voting on “To approve, on an advisory (non-binding) basis, the compensation of our named executive officers as disclosed ” at Onto Innovation Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard5,594,2223 00For
BlackRock5,280,711358 00For
Fidelity2,761,1760 00For
T. Rowe Price1,847,6450 00For
Thrivent1,468,5100 00For
Voya1,434,2870 00For
State Street1,389,0000 00For
Point721,369,2360 00For
GEODE CAPITAL MANAGEMENT, LLC1,197,5950 00For
Charles Schwab1,053,6170 00For
PARADIGM CAPITAL MANAGEMENT INC/NY1,035,6210 00For
Invesco974,9110 00For
WILLIAM BLAIR INVESTMENT MANAGEMENT, LLC901,1730 00For
GENEVA CAPITAL MANAGEMENT LLC683,8700 00For
JENNISON ASSOCIATES LLC554,3900 00For
Allspring454,7110 00For
Northern Trust448,0490 00For
AQR439,9220 00For
WESTFIELD CAPITAL MANAGEMENT CO LP439,0810 00For
Fisher Asset Management, LLC395,4090 00For
Pacer Funds Trust367,3930 00For
FRANKLIN ADVISERS INC362,0860 00For
Dimensional358,1400 00For
MELLON INVESTMENTS Corp335,6000 00For
Prudential/PGIM334,1740 00For

Showing the 25 largest of 533 asset managers. See all 533 in the interactive database.

2. Election of Directors: Stephen S. Schwartz

DIRECTOR ELECTIONSMajority of the votes cast: yes

Combines 6 wordings of this item as funds reported it.

99% Majority: yes · of votes cast

FOR 99%
FOR: 41,523,952AGAINST: 444,091

Onto Innovation Inc.’s own tally for this item (“Elect Director: Stephen S. Schwartz”): 41,523,952 for, 444,091 against, per its Form 8-K filed 2026-05-20 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item. Of all 49,744,000 outstanding shares: 83% for, 0.9% against (84% of the company cast a for/against vote).

The 134 asset managers below cast 99.9% of the shares they voted on this item FOR (20,071,510 for, 1,669 against).

FOR 99.9%
FOR: 20,071,510 (99.9%)AGAINST: 1,669 (0.0%)ABSTAIN: 9,761 (0.0%)
Largest asset managers voting on “Election of Directors: Stephen S. Schwartz” at Onto Innovation Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard5,204,1912 00For
BlackRock3,185,0490 00For
Fidelity1,889,6650 00For
Thrivent729,1800 00For
T. Rowe Price718,2890 00For
Voya554,0690 00For
Charles Schwab526,0120 00For
Pacer Funds Trust367,3930 00For
State Street367,2140 00For
Invesco322,1580 00For
Prudential/PGIM321,9150 00For
FRANKLIN STRATEGIC SERIES267,3420 00For
ETF Series Solutions254,6980 00For
Royce247,7030 00For
Nationwide247,0980 00For
FRANKLIN VALUE INVESTORS TRUST245,7870 00For
Dimensional228,5120 00For
Columbia Threadneedle222,3740 00For
JPMorgan176,9330 00For
Bridge Builder Trust172,6860 00For
Jackson National169,7390 00For
First Trust160,1850 00For
Goldman Sachs157,5890 00For
HARBOR FUNDS157,3570 00For
WILLIAM BLAIR FUNDS153,0490 00For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

3. Election of Directors: Stephen D. Kelley

DIRECTOR ELECTIONSMajority of the votes cast: yes

Combines 6 wordings of this item as funds reported it.

99% Majority: yes · of votes cast

FOR 99%
FOR: 41,519,539AGAINST: 447,694

Onto Innovation Inc.’s own tally for this item (“Elect Director: Stephen D. Kelley”): 41,519,539 for, 447,694 against, per its Form 8-K filed 2026-05-20 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item. Of all 49,744,000 outstanding shares: 83% for, 0.9% against (84% of the company cast a for/against vote).

The 134 asset managers below cast 99.9% of the shares they voted on this item FOR (20,071,510 for, 1,669 against).

FOR 99.9%
FOR: 20,071,510 (99.9%)AGAINST: 1,669 (0.0%)ABSTAIN: 9,761 (0.0%)
Largest asset managers voting on “Election of Directors: Stephen D. Kelley” at Onto Innovation Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard5,204,1912 00For
BlackRock3,185,0490 00For
Fidelity1,889,6650 00For
Thrivent729,1800 00For
T. Rowe Price718,2890 00For
Voya554,0690 00For
Charles Schwab526,0120 00For
Pacer Funds Trust367,3930 00For
State Street367,2140 00For
Invesco322,1580 00For
Prudential/PGIM321,9150 00For
FRANKLIN STRATEGIC SERIES267,3420 00For
ETF Series Solutions254,6980 00For
Royce247,7030 00For
Nationwide247,0980 00For
FRANKLIN VALUE INVESTORS TRUST245,7870 00For
Dimensional228,5120 00For
Columbia Threadneedle222,3740 00For
JPMorgan176,9330 00For
Bridge Builder Trust172,6860 00For
Jackson National169,7390 00For
First Trust160,1850 00For
Goldman Sachs157,5890 00For
HARBOR FUNDS157,3570 00For
WILLIAM BLAIR FUNDS153,0490 00For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

4. Election of Directors: Susan D. Lynch

DIRECTOR ELECTIONSMajority of the votes cast: yes

Combines 6 wordings of this item as funds reported it.

99.3% Majority: yes · of votes cast

FOR 99.3%
FOR: 41,705,037AGAINST: 262,190

Onto Innovation Inc.’s own tally for this item (“Elect Director: Susan D. Lynch”): 41,705,037 for, 262,190 against, per its Form 8-K filed 2026-05-20 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item. Of all 49,744,000 outstanding shares: 84% for, 0.6% against (84% of the company cast a for/against vote).

The 134 asset managers below cast 99.9% of the shares they voted on this item FOR (20,067,241 for, 5,937 against).

FOR 99.9%
FOR: 20,067,241 (99.9%)AGAINST: 5,937 (0.0%)ABSTAIN: 9,761 (0.0%)
Largest asset managers voting on “Election of Directors: Susan D. Lynch” at Onto Innovation Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard5,200,6783,514 00For
BlackRock3,185,0490 00For
Fidelity1,889,6650 00For
Thrivent729,1800 00For
T. Rowe Price718,2890 00For
Voya554,0690 00For
Charles Schwab526,0120 00For
Pacer Funds Trust367,3930 00For
State Street367,2140 00For
Invesco322,1580 00For
Prudential/PGIM321,9150 00For
FRANKLIN STRATEGIC SERIES267,3420 00For
ETF Series Solutions254,6980 00For
Royce247,7030 00For
Nationwide247,0980 00For
FRANKLIN VALUE INVESTORS TRUST245,7870 00For
Dimensional228,5120 00For
Columbia Threadneedle222,3740 00For
JPMorgan176,9330 00For
Bridge Builder Trust172,6860 00For
Jackson National169,7390 00For
First Trust160,1850 00For
Goldman Sachs157,5890 00For
HARBOR FUNDS157,3570 00For
WILLIAM BLAIR FUNDS153,0490 00For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

5. Election of Directors: David B. Miller

DIRECTOR ELECTIONSMajority of the votes cast: yes

Combines 6 wordings of this item as funds reported it.

92% Majority: yes · of votes cast

FOR 92%8%
FOR: 38,775,556AGAINST: 3,185,107

Onto Innovation Inc.’s own tally for this item (“Elect Director: David B. Miller”): 38,775,556 for, 3,185,107 against, per its Form 8-K filed 2026-05-20 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item. Of all 49,744,000 outstanding shares: 78% for, 6% against (84% of the company cast a for/against vote).

The 134 asset managers below cast 97% of the shares they voted on this item FOR (19,562,596 for, 510,582 against).

FOR 97%
FOR: 19,562,596 (97.4%)AGAINST: 510,582 (2.5%)ABSTAIN: 9,761 (0.0%)
Largest asset managers voting on “Election of Directors: David B. Miller” at Onto Innovation Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard5,200,6693,523 00For
BlackRock3,185,0490 00For
Fidelity1,889,6650 00For
Thrivent729,1800 00For
T. Rowe Price718,2890 00For
Voya554,0690 00For
Charles Schwab526,0120 00For
Pacer Funds Trust367,3930 00For
State Street367,2140 00For
Invesco322,1580 00For
Prudential/PGIM321,9150 00For
FRANKLIN STRATEGIC SERIES267,3420 00For
ETF Series Solutions254,6980 00For
Royce247,7030 00For
Nationwide247,0980 00For
FRANKLIN VALUE INVESTORS TRUST0245,787 00Against
Dimensional228,5120 00For
Columbia Threadneedle222,3740 00For
JPMorgan176,9330 00For
Bridge Builder Trust172,6860 00For
Jackson National169,7390 00For
First Trust160,1850 00For
Goldman Sachs157,5890 00For
HARBOR FUNDS157,3570 00For
WILLIAM BLAIR FUNDS153,0490 00For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

6. Election of Directors: Michael P. Plisinski

DIRECTOR ELECTIONSMajority of the votes cast: yes

Combines 6 wordings of this item as funds reported it.

99.3% Majority: yes · of votes cast

FOR 99.3%
FOR: 41,724,970AGAINST: 280,583

Onto Innovation Inc.’s own tally for this item (“Elect Director: Michael P. Plisinski”): 41,724,970 for, 280,583 against, per its Form 8-K filed 2026-05-20 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item. Of all 49,744,000 outstanding shares: 84% for, 0.6% against (84% of the company cast a for/against vote).

The 134 asset managers below cast 99.9% of the shares they voted on this item FOR (20,071,512 for, 1,667 against).

FOR 99.9%
FOR: 20,071,512 (99.9%)AGAINST: 1,667 (0.0%)ABSTAIN: 9,761 (0.0%)
Largest asset managers voting on “Election of Directors: Michael P. Plisinski” at Onto Innovation Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard5,204,1930 00For
BlackRock3,185,0490 00For
Fidelity1,889,6650 00For
Thrivent729,1800 00For
T. Rowe Price718,2890 00For
Voya554,0690 00For
Charles Schwab526,0120 00For
Pacer Funds Trust367,3930 00For
State Street367,2140 00For
Invesco322,1580 00For
Prudential/PGIM321,9150 00For
FRANKLIN STRATEGIC SERIES267,3420 00For
ETF Series Solutions254,6980 00For
Royce247,7030 00For
Nationwide247,0980 00For
FRANKLIN VALUE INVESTORS TRUST245,7870 00For
Dimensional228,5120 00For
Columbia Threadneedle222,3740 00For
JPMorgan176,9330 00For
Bridge Builder Trust172,6860 00For
Jackson National169,7390 00For
First Trust160,1850 00For
Goldman Sachs157,5890 00For
HARBOR FUNDS157,3570 00For
WILLIAM BLAIR FUNDS153,0490 00For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

7. Election of Directors: Christopher A. Seams

DIRECTOR ELECTIONSMajority of the votes cast: yes

Combines 6 wordings of this item as funds reported it.

96% Majority: yes · of votes cast

FOR 96%
FOR: 40,522,014AGAINST: 1,479,450

Onto Innovation Inc.’s own tally for this item (“Elect Director: Christopher A. Seams”): 40,522,014 for, 1,479,450 against, per its Form 8-K filed 2026-05-20 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item. Of all 49,744,000 outstanding shares: 81% for, 3% against (84% of the company cast a for/against vote).

The 134 asset managers below cast 99.8% of the shares they voted on this item FOR (20,043,564 for, 29,614 against).

FOR 99.8%
FOR: 20,043,564 (99.8%)AGAINST: 29,614 (0.1%)ABSTAIN: 9,761 (0.0%)
Largest asset managers voting on “Election of Directors: Christopher A. Seams” at Onto Innovation Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard5,200,6743,518 00For
BlackRock3,185,0490 00For
Fidelity1,889,6650 00For
Thrivent729,1800 00For
T. Rowe Price718,2890 00For
Voya554,0690 00For
Charles Schwab526,0120 00For
Pacer Funds Trust367,3930 00For
State Street367,2140 00For
Invesco322,1580 00For
Prudential/PGIM321,9150 00For
FRANKLIN STRATEGIC SERIES267,3420 00For
ETF Series Solutions254,6980 00For
Royce247,7030 00For
Nationwide247,0980 00For
FRANKLIN VALUE INVESTORS TRUST245,7870 00For
Dimensional228,5120 00For
Columbia Threadneedle222,3740 00For
JPMorgan176,9330 00For
Bridge Builder Trust172,6860 00For
Jackson National169,7390 00For
First Trust160,1850 00For
Goldman Sachs157,5890 00For
HARBOR FUNDS157,3570 00For
WILLIAM BLAIR FUNDS153,0490 00For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

8. Election of Directors: May Su

DIRECTOR ELECTIONSMajority of the votes cast: yes

Combines 5 wordings of this item as funds reported it.

98% Majority: yes · of votes cast

FOR 98%
FOR: 41,056,051AGAINST: 904,119

Onto Innovation Inc.’s own tally for this item (“Elect Director: May Su”): 41,056,051 for, 904,119 against, per its Form 8-K filed 2026-05-20 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item. Of all 49,744,000 outstanding shares: 83% for, 2% against (84% of the company cast a for/against vote).

The 134 asset managers below cast 99.9% of the shares they voted on this item FOR (20,062,363 for, 10,816 against).

FOR 99.8%
FOR: 20,062,363 (99.9%)AGAINST: 10,816 (0.1%)ABSTAIN: 9,761 (0.0%)
Largest asset managers voting on “Election of Directors: May Su” at Onto Innovation Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard5,204,1912 00For
BlackRock3,185,0490 00For
Fidelity1,889,6650 00For
Thrivent729,1800 00For
T. Rowe Price718,2890 00For
Voya554,0690 00For
Charles Schwab526,0120 00For
Pacer Funds Trust367,3930 00For
State Street367,2140 00For
Invesco322,1580 00For
Prudential/PGIM321,9150 00For
FRANKLIN STRATEGIC SERIES267,3420 00For
ETF Series Solutions254,6980 00For
Royce247,7030 00For
Nationwide247,0980 00For
FRANKLIN VALUE INVESTORS TRUST245,7870 00For
Dimensional228,5120 00For
Columbia Threadneedle222,3740 00For
JPMorgan176,9330 00For
Bridge Builder Trust172,6860 00For
Jackson National169,7390 00For
First Trust160,1850 00For
Goldman Sachs157,5890 00For
HARBOR FUNDS157,3570 00For
WILLIAM BLAIR FUNDS153,0490 00For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

9. To ratify the appointment of Ernst & Young LLP as our independent registered public accounting firm for the fiscal year ending December 31, 2026.

AUDIT-RELATEDMajority of the votes cast: yes

Combines 4 wordings of this item as funds reported it.

99.6% Majority: yes · of votes cast

FOR 99.6%
FOR: 44,378,549AGAINST: 178,157

Onto Innovation Inc.’s own tally for this item (“Proposal 3: The stockholders ratified Ernst & Young LLP as the Company's independent registered public accounting firm for the fiscal year ending December 31, 2026, by the following vote:”): 44,378,549 for, 178,157 against, per its Form 8-K filed 2026-05-20 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item. Of all 49,744,000 outstanding shares: 89% for, 0.4% against (90% of the company cast a for/against vote).

The 134 asset managers below cast 99.9% of the shares they voted on this item FOR (20,055,658 for, 21 against).

FOR 99.9%
FOR: 20,055,658 (100.0%)AGAINST: 21 (0.0%)ABSTAIN: 9,761 (0.0%)
Largest asset managers voting on “To ratify the appointment of Ernst & Young LLP as our independent registered public accounting firm for the fi” at Onto Innovation Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard5,204,1930 00For
BlackRock3,185,0490 00For
Fidelity1,889,6650 00For
Thrivent729,1800 00For
T. Rowe Price718,2890 00For
Voya554,0690 00For
Charles Schwab526,0120 00For
Pacer Funds Trust367,3930 00For
State Street367,19321 00For
Invesco322,1580 00For
Prudential/PGIM321,9150 00For
FRANKLIN STRATEGIC SERIES267,3420 00For
ETF Series Solutions254,6980 00For
Royce247,7030 00For
Nationwide247,0980 00For
FRANKLIN VALUE INVESTORS TRUST245,7870 00For
Dimensional228,5120 00For
Columbia Threadneedle222,3740 00For
JPMorgan176,9330 00For
Bridge Builder Trust172,6860 00For
Jackson National169,7390 00For
First Trust160,1850 00For
Goldman Sachs157,5890 00For
HARBOR FUNDS157,3570 00For
WILLIAM BLAIR FUNDS153,0490 00For

Showing the 25 largest of 134 asset managers. See all 134 in the interactive database.

10. Ratify Appointment of Independent Auditors

AUDIT-RELATEDMajority of the votes cast: yes

99.6% Majority: yes · of votes cast

FOR 99.6%
FOR: 44,378,549AGAINST: 178,157

Onto Innovation Inc.’s own tally for this item (“Proposal 3: The stockholders ratified Ernst & Young LLP as the Company's independent registered public accounting firm for the fiscal year ending December 31, 2026, by the following vote:”): 44,378,549 for, 178,157 against, per its Form 8-K filed 2026-05-20 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item. Of all 49,744,000 outstanding shares: 89% for, 0.4% against (90% of the company cast a for/against vote).

The 2 asset managers below cast 100% of the shares they voted on this item FOR (20,585 for, 0 against).

FOR 100%
FOR: 20,585 (100.0%)
Largest asset managers voting on “Ratify Appointment of Independent Auditors” at Onto Innovation Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
AMERICAN BEACON FUNDS17,5000 00For
NORTHERN LIGHTS FUND TRUST II3,0850 00For

Largest Onto Innovation Inc. shareholders voting in 2025-2026

Ranked by the number of Onto Innovation Inc. shares each manager voted on the most widely held ballot item of the 2025-2026 meeting, shown as a share of the 49,744,000 shares outstanding at the time of that meeting.

Top Onto Innovation Inc. shareholders by shares voted, 2025-2026
#Asset manager % of shares outstanding
1Vanguard 11.25%
2BlackRock 10.62%
3Fidelity 5.55%
4T. Rowe Price 3.71%
5Thrivent 2.95%
6Voya 2.88%
7State Street 2.79%
8Point72 2.75%
9GEODE CAPITAL MANAGEMENT, LLC 2.41%
10Charles Schwab 2.12%

Reported Onto Innovation Inc. ownership

Positions disclosed to the SEC on Schedules 13D and 13G, Form 13F and the company’s own proxy statement (DEF 14A).

Onto Innovation Inc. beneficial owners on record for the 2025-2026 proxy season
Holder % outstanding Disclosure
Vanguard Group 11.21% 13F
BlackRock 11.13% 13F
Vanguard Portfolio Management 5.53% 13G
State Street 3.01% 13F
Point72 2.42% 13F
FMR (Fidelity) 1.67% 13F
D.E. Shaw 1.45% 13F
Dimensional Fund Advisors 1.36% 13F
Invesco 1.27% 13F
T. Rowe Price 1.22% 13F

Percentages above are of 49,744,000 shares outstanding, as reported by Onto Innovation Inc. on its Form 10-Q dated 2026-03-31 (see the filing on EDGAR). This is the count contemporaneous with the 2025-2026 meeting, so the percentages are the ones that were true then, not ones restated against today’s share count.

About this page

Every figure above is derived from filings made with the US Securities and Exchange Commission: Form N-PX, in which registered investment companies and institutional managers disclose how they voted every proxy, and Form 8-K Item 5.07, in which the company reports its own meeting results. Shares outstanding are taken from Onto Innovation Inc.’s 10-Q dated 2026-03-31. This page is a static snapshot rebuilt weekly on 02 October 2026; a live search always shows the current data.

At Onto Innovation Inc.'s shareholder meeting held 2026-05-20, in the 2025-2026 proxy season, 536 asset managers reported how they voted in their SEC Form N-PX filings, covering 6,003 separate fund positions. Their filings are grouped here into 10 reported items; because filers word the same ballot item differently, that can be more than the number of items on the ballot. On the most widely held item on that ballot — To approve, on an advisory (non-binding) basis, the compensation of our named executive… — FOR was 97% of the votes cast (FOR divided by FOR plus AGAINST, the conventional basis for proxy support; abstentions, broker non-votes and unvoted shares are excluded because none of them took a side), which is more than half. Whether the item was approved is for the filing to say; that statement has not been read for this item. Source: Onto Innovation Inc.'s Form 8-K, Item 5.07, filed with the U.S. Securities and Exchange Commission on 2026-05-20.

Onto Innovation Inc. proxy season coverage: 2023-2024 · 2024-2025 · 2025-2026 (this page).