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AXCELIS TECHNOLOGIES INC. 2023-2024 Proxy Voting Records

Compiled from SEC Form N-PX filings and AXCELIS TECHNOLOGIES INC.’s Form 8-K, filed 2024-05-09 (Item 5.07 on EDGAR). Page generated 02 October 2026.

19Reported items
398Asset managers
5,046Fund votes
2024-05-09Meeting date

Proxy season: 2023-2024 2024-2025 2025-2026

Explore AXCELIS TECHNOLOGIES INC. in the interactive database Compare manager voting policies

Official 2023-2024 meeting results reported by AXCELIS TECHNOLOGIES INC.

These tallies are AXCELIS TECHNOLOGIES INC.’s own, as disclosed to the U.S. Securities and Exchange Commission on Form 8-K, filed 2024-05-09 (Item 5.07, “Submission of Matters to a Vote of Security Holders”). They cover every share voted at the meeting, not just the funds that file Form N-PX.

AXCELIS TECHNOLOGIES INC. — official shareholder meeting results, meeting held 2024-05-09
Ballot item	For	Against	Abstain	Withheld	Broker non-votes	Outcome
Proposal 1: At the Annual Meeting, each of the nine nominees for election as directors received the number of votes set forth opposite the nominee's name, constituting a plurality of the votes cast, and therefore such nominee has been duly elected as a directo	22,278,399	--	--	2,660,214	3,497,518	Majority: yes

Source: AXCELIS TECHNOLOGIES INC., Form 8-K, filed with the SEC on 2024-05-09 — read the filing on EDGAR.

How asset managers voted at the AXCELIS TECHNOLOGIES INC. 2023-2024 meeting

Each item below shows how the 398 asset managers that disclosed a AXCELIS TECHNOLOGIES INC. vote in their SEC Form N-PX filings actually voted. Share totals are the shares those managers' funds voted, summed across every fund they report. These are reported items, not a count of the ballot: fund filings describe one ballot item in different words. Two descriptions are shown as one item only on evidence — the same text (or one cut short of the other), the same director nominee, or a match to the same row of AXCELIS TECHNOLOGIES INC.’s own Form 8-K tally — never because they merely read alike. A description that could not be joined that way is listed on its own, so one ballot item can appear more than once.

1. Say on Pay - An advisory vote on the approval of executive compensation.

SECTION 14A SAY-ON-PAY VOTES

Combines 8 wordings of this item as funds reported it.

92% fund support · no official result

FOR 92%8%

The 378 asset managers below cast 92% of the shares they voted on this item FOR (26,651,900 for, 2,377,549 against).

FOR: 26,651,900 (91.8%)AGAINST: 2,377,549 (8.2%)ABSTAIN: 8,355 (0.0%)NOT VOTED: 138 (0.0%)UNKNOWN: 3 (0.0%)

Largest asset managers voting on “Say on Pay - An advisory vote on the approval of executive compensation.” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Against	Vote
BlackRock	4,940,826	285	For
Vanguard	4,269,116	0	For
State Street	1,639,971	0	For
PRIMECAP MANAGEMENT CO/CA/	1,013,046	0	For
PRIMECAP Odyssey Funds	945,946	0	For
Man Group plc	0	903,840	Against
Fidelity	878,067	0	For
Charles Schwab	867,436	0	For
Putnam	861,885	0	For
T. Rowe Price	816,160	0	For
GEODE CAPITAL MANAGEMENT, LLC	794,289	0	For
American Century	0	656,414	Against
Dimensional	655,422	0	For
Jackson Square Partners, LLC	419,101	0	For
Calvert	388,231	0	For
Northern Trust	358,305	23	For
Invesco	349,081	0	For
Nuveen	290,127	0	For
BNP Paribas Asset Management Holding S.A.	0	287,743	Against
TIAA	270,175	0	For
Senvest Management, LLC	235,598	0	For
MELLON INVESTMENTS Corp	232,293	0	For
AMERIPRISE FINANCIAL INC	221,306	0	For
Columbia Threadneedle	214,266	0	For
OBERWEIS ASSET MANAGEMENT INC/	213,309	0	For

Showing the 25 largest of 378 asset managers. See all 378 in the interactive database.

2. Proposal to amend Restated Certificate of Incorporation to limit certain executive officers' liability under Delaware law.

CORPORATE GOVERNANCE

Combines 2 wordings of this item as funds reported it.

98% fund support · no official result

FOR 98%

The 113 asset managers below cast 98% of the shares they voted on this item FOR (14,854,129 for, 253,510 against).

FOR: 14,854,129 (98.3%)AGAINST: 253,510 (1.7%)ABSTAIN: 8,355 (0.1%)

Largest asset managers voting on “Proposal to amend Restated Certificate of Incorporation to limit certain executive officers' liability under D” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Against	Abstain	Vote
Vanguard	4,175,453	0	0	For
BlackRock	3,688,908	0	0	For
PRIMECAP Odyssey Funds	945,946	0	0	For
Fidelity	857,529	0	0	For
Dimensional	563,421	0	0	For
State Street	505,185	46	0	For
Charles Schwab	429,684	0	0	For
T. Rowe Price	350,227	0	0	For
American Century	286,999	0	0	For
TIAA	270,175	0	0	For
Columbia Threadneedle	214,266	0	0	For
OBERWEIS FUNDS	201,829	0	0	For
Calvert	192,688	0	0	For
Managed Portfolio Series	117,477	62,000	0	For
Invesco	165,529	0	0	For
Direxion Shares ETF Trust	163,211	0	0	For
MFS	155,541	0	0	For
Jackson National	98,746	55,000	0	For
Equitable	90,217	0	0	For
Goldman Sachs	83,018	0	0	For
Putnam	74,415	0	0	For
Voya	73,933	0	0	For
Brighthouse	64,477	0	8,355	For
Bridge Builder Trust	67,327	1,495	0	For
Royce	65,878	0	0	For

Showing the 25 largest of 113 asset managers. See all 113 in the interactive database.

3. Proposal to ratify independent public accounting firm.

AUDIT-RELATED

Combines 2 wordings of this item as funds reported it.

99.8% fund support · no official result

FOR 99.8%

The 112 asset managers below cast 99.8% of the shares they voted on this item FOR (15,085,673 for, 21,820 against).

FOR: 15,085,673 (99.8%)AGAINST: 21,820 (0.1%)ABSTAIN: 8,355 (0.1%)

Largest asset managers voting on “Proposal to ratify independent public accounting firm.” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Against	Abstain	Vote
Vanguard	4,175,453	0	0	For
BlackRock	3,688,908	0	0	For
PRIMECAP Odyssey Funds	945,946	0	0	For
Fidelity	857,529	0	0	For
Dimensional	563,421	0	0	For
State Street	505,185	46	0	For
Charles Schwab	429,684	0	0	For
T. Rowe Price	350,227	0	0	For
American Century	286,999	0	0	For
TIAA	270,175	0	0	For
Columbia Threadneedle	214,266	0	0	For
OBERWEIS FUNDS	201,829	0	0	For
Calvert	192,688	0	0	For
Managed Portfolio Series	179,477	0	0	For
Invesco	165,529	0	0	For
Direxion Shares ETF Trust	163,211	0	0	For
MFS	155,541	0	0	For
Jackson National	153,746	0	0	For
Equitable	90,217	0	0	For
Goldman Sachs	83,018	0	0	For
Putnam	74,415	0	0	For
Voya	73,933	0	0	For
Brighthouse	64,477	0	8,355	For
Bridge Builder Trust	68,822	0	0	For
Royce	65,878	0	0	For

Showing the 25 largest of 112 asset managers. See all 112 in the interactive database.

4. Election of Directors: Dipti Vachani

DIRECTOR ELECTIONS

Combines 5 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.9%

The 106 asset managers below cast 100% of the shares they voted on this item FOR (15,106,479 for, 0 against).

FOR: 15,106,479 (99.9%)ABSTAIN: 8,700 (0.1%)

Largest asset managers voting on “Election of Directors: Dipti Vachani” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Abstain	Vote
Vanguard	4,175,453	0	For
BlackRock	3,688,908	0	For
PRIMECAP Odyssey Funds	945,946	0	For
Fidelity	857,529	0	For
Dimensional	563,421	0	For
State Street	505,134	97	For
Charles Schwab	429,684	0	For
T. Rowe Price	350,227	0	For
American Century	286,999	0	For
TIAA	270,175	0	For
Columbia Threadneedle	214,266	0	For
OBERWEIS FUNDS	201,829	0	For
Calvert	192,688	0	For
Managed Portfolio Series	179,477	0	For
Invesco	165,529	0	For
Direxion Shares ETF Trust	163,211	0	For
MFS	155,541	0	For
Jackson National	153,746	0	For
Equitable	90,217	0	For
Goldman Sachs	83,018	0	For
Putnam	74,415	0	For
Voya	73,933	0	For
Brighthouse	64,477	8,355	For
Bridge Builder Trust	68,822	0	For
Royce	65,878	0	For

Showing the 25 largest of 106 asset managers. See all 106 in the interactive database.

5. Election of Directors: Gregory B. Graves

DIRECTOR ELECTIONS

Combines 5 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.6%

The 106 asset managers below cast 100% of the shares they voted on this item FOR (15,061,477 for, 0 against).

FOR: 15,061,477 (99.6%)ABSTAIN: 53,702 (0.4%)

Largest asset managers voting on “Election of Directors: Gregory B. Graves” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Abstain	Vote
Vanguard	4,175,453	0	For
BlackRock	3,688,908	0	For
PRIMECAP Odyssey Funds	945,946	0	For
Fidelity	857,529	0	For
Dimensional	563,421	0	For
State Street	505,231	0	For
Charles Schwab	429,684	0	For
T. Rowe Price	350,227	0	For
American Century	286,999	0	For
TIAA	270,175	0	For
Columbia Threadneedle	214,266	0	For
OBERWEIS FUNDS	201,829	0	For
Calvert	192,688	0	For
Managed Portfolio Series	179,477	0	For
Invesco	165,529	0	For
Direxion Shares ETF Trust	163,211	0	For
MFS	155,541	0	For
Jackson National	153,746	0	For
Equitable	90,217	0	For
Goldman Sachs	83,018	0	For
Putnam	74,415	0	For
Voya	73,933	0	For
Brighthouse	64,477	8,355	For
Bridge Builder Trust	68,822	0	For
Royce	65,878	0	For

Showing the 25 largest of 106 asset managers. See all 106 in the interactive database.

6. Election of Directors: Jeanne Quirk

DIRECTOR ELECTIONS

Combines 5 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99%

The 106 asset managers below cast 100% of the shares they voted on this item FOR (14,907,821 for, 0 against).

FOR: 14,907,821 (98.6%)ABSTAIN: 207,358 (1.4%)

Largest asset managers voting on “Election of Directors: Jeanne Quirk” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Abstain	Vote
Vanguard	4,175,453	0	For
BlackRock	3,688,908	0	For
PRIMECAP Odyssey Funds	945,946	0	For
Fidelity	857,529	0	For
Dimensional	563,421	0	For
State Street	505,069	162	For
Charles Schwab	429,684	0	For
T. Rowe Price	350,227	0	For
American Century	286,999	0	For
TIAA	270,175	0	For
Columbia Threadneedle	214,266	0	For
OBERWEIS FUNDS	201,829	0	For
Calvert	192,688	0	For
Managed Portfolio Series	179,477	0	For
Invesco	165,529	0	For
Direxion Shares ETF Trust	163,211	0	For
MFS	0	155,541	Abstain
Jackson National	153,746	0	For
Equitable	90,217	0	For
Goldman Sachs	83,018	0	For
Putnam	74,415	0	For
Voya	73,933	0	For
Brighthouse	64,477	8,355	For
Bridge Builder Trust	25,837	42,985	Abstain
Royce	65,878	0	For

Showing the 25 largest of 106 asset managers. See all 106 in the interactive database.

7. Election of Directors: John T. Kurtzweil

DIRECTOR ELECTIONS

Combines 5 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.9%

The 106 asset managers below cast 100% of the shares they voted on this item FOR (15,100,899 for, 0 against).

FOR: 15,100,899 (99.9%)ABSTAIN: 14,280 (0.1%)

Largest asset managers voting on “Election of Directors: John T. Kurtzweil” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Abstain	Vote
Vanguard	4,175,453	0	For
BlackRock	3,688,908	0	For
PRIMECAP Odyssey Funds	945,946	0	For
Fidelity	857,529	0	For
Dimensional	563,421	0	For
State Street	505,134	97	For
Charles Schwab	429,684	0	For
T. Rowe Price	350,227	0	For
American Century	286,999	0	For
TIAA	270,175	0	For
Columbia Threadneedle	214,266	0	For
OBERWEIS FUNDS	201,829	0	For
Calvert	192,688	0	For
Managed Portfolio Series	179,477	0	For
Invesco	165,529	0	For
Direxion Shares ETF Trust	163,211	0	For
MFS	155,541	0	For
Jackson National	153,746	0	For
Equitable	90,217	0	For
Goldman Sachs	83,018	0	For
Putnam	74,415	0	For
Voya	73,933	0	For
Brighthouse	64,477	8,355	For
Bridge Builder Trust	68,822	0	For
Royce	65,878	0	For

Showing the 25 largest of 106 asset managers. See all 106 in the interactive database.

8. Election of Directors: Jorge Titinger

DIRECTOR ELECTIONS

Combines 5 wordings of this item as funds reported it.

100% fund support · no official result

FOR 91%9%

The 106 asset managers below cast 100% of the shares they voted on this item FOR (13,751,136 for, 0 against).

FOR: 13,751,136 (91.0%)ABSTAIN: 1,364,043 (9.0%)

Largest asset managers voting on “Election of Directors: Jorge Titinger” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Abstain	Vote
Vanguard	4,175,453	0	For
BlackRock	3,688,908	0	For
PRIMECAP Odyssey Funds	945,946	0	For
Fidelity	857,529	0	For
Dimensional	0	563,421	Abstain
State Street	4,625	500,606	Abstain
Charles Schwab	429,684	0	For
T. Rowe Price	350,227	0	For
American Century	286,999	0	For
TIAA	270,175	0	For
Columbia Threadneedle	214,266	0	For
OBERWEIS FUNDS	201,829	0	For
Calvert	0	192,688	Abstain
Managed Portfolio Series	179,477	0	For
Invesco	165,529	0	For
Direxion Shares ETF Trust	163,211	0	For
MFS	155,541	0	For
Jackson National	145,900	7,846	For
Equitable	90,217	0	For
Goldman Sachs	83,018	0	For
Putnam	74,415	0	For
Voya	73,933	0	For
Brighthouse	64,477	8,355	For
Bridge Builder Trust	68,822	0	For
Royce	65,878	0	For

Showing the 25 largest of 106 asset managers. See all 106 in the interactive database.

9. Election of Directors: Necip Sayiner, Ph.D.

DIRECTOR ELECTIONS

Combines 5 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.9%

The 106 asset managers below cast 100% of the shares they voted on this item FOR (15,106,576 for, 0 against).

FOR: 15,106,576 (99.9%)ABSTAIN: 8,603 (0.1%)

Largest asset managers voting on “Election of Directors: Necip Sayiner, Ph.D.” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Abstain	Vote
Vanguard	4,175,453	0	For
BlackRock	3,688,908	0	For
PRIMECAP Odyssey Funds	945,946	0	For
Fidelity	857,529	0	For
Dimensional	563,421	0	For
State Street	505,231	0	For
Charles Schwab	429,684	0	For
T. Rowe Price	350,227	0	For
American Century	286,999	0	For
TIAA	270,175	0	For
Columbia Threadneedle	214,266	0	For
OBERWEIS FUNDS	201,829	0	For
Calvert	192,688	0	For
Managed Portfolio Series	179,477	0	For
Invesco	165,529	0	For
Direxion Shares ETF Trust	163,211	0	For
MFS	155,541	0	For
Jackson National	153,746	0	For
Equitable	90,217	0	For
Goldman Sachs	83,018	0	For
Putnam	74,415	0	For
Voya	73,933	0	For
Brighthouse	64,477	8,355	For
Bridge Builder Trust	68,822	0	For
Royce	65,878	0	For

Showing the 25 largest of 106 asset managers. See all 106 in the interactive database.

10. Election of Directors: Russell J. Low, Ph.D.

DIRECTOR ELECTIONS

Combines 5 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.9%

The 106 asset managers below cast 100% of the shares they voted on this item FOR (15,105,725 for, 0 against).

FOR: 15,105,725 (99.9%)ABSTAIN: 9,454 (0.1%)

Largest asset managers voting on “Election of Directors: Russell J. Low, Ph.D.” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Abstain	Vote
Vanguard	4,175,453	0	For
BlackRock	3,688,908	0	For
PRIMECAP Odyssey Funds	945,946	0	For
Fidelity	857,529	0	For
Dimensional	563,421	0	For
State Street	505,134	97	For
Charles Schwab	429,684	0	For
T. Rowe Price	350,227	0	For
American Century	286,999	0	For
TIAA	270,175	0	For
Columbia Threadneedle	214,266	0	For
OBERWEIS FUNDS	201,829	0	For
Calvert	192,688	0	For
Managed Portfolio Series	179,477	0	For
Invesco	165,529	0	For
Direxion Shares ETF Trust	163,211	0	For
MFS	155,541	0	For
Jackson National	153,746	0	For
Equitable	90,217	0	For
Goldman Sachs	83,018	0	For
Putnam	74,415	0	For
Voya	73,933	0	For
Brighthouse	64,477	8,355	For
Bridge Builder Trust	68,822	0	For
Royce	65,878	0	For

Showing the 25 largest of 106 asset managers. See all 106 in the interactive database.

11. Election of Directors: Thomas St. Dennis

DIRECTOR ELECTIONS

Combines 5 wordings of this item as funds reported it.

100% fund support · no official result

FOR 95%

The 106 asset managers below cast 100% of the shares they voted on this item FOR (14,309,416 for, 0 against).

FOR: 14,309,416 (94.7%)ABSTAIN: 805,763 (5.3%)

Largest asset managers voting on “Election of Directors: Thomas St. Dennis” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Abstain	Vote
Vanguard	4,175,453	0	For
BlackRock	3,688,908	0	For
PRIMECAP Odyssey Funds	945,946	0	For
Fidelity	857,529	0	For
Dimensional	563,421	0	For
State Street	4,560	500,671	Abstain
Charles Schwab	429,684	0	For
T. Rowe Price	350,227	0	For
American Century	286,999	0	For
TIAA	270,175	0	For
Columbia Threadneedle	214,266	0	For
OBERWEIS FUNDS	201,829	0	For
Calvert	192,688	0	For
Managed Portfolio Series	179,477	0	For
Invesco	165,529	0	For
Direxion Shares ETF Trust	163,211	0	For
MFS	0	155,541	Abstain
Jackson National	153,746	0	For
Equitable	90,217	0	For
Goldman Sachs	83,018	0	For
Putnam	74,415	0	For
Voya	73,933	0	For
Brighthouse	64,477	8,355	For
Bridge Builder Trust	25,837	42,985	Abstain
Royce	65,878	0	For

Showing the 25 largest of 106 asset managers. See all 106 in the interactive database.

12. Election of Directors: Tzu-Yin Chiu, Ph.D.

DIRECTOR ELECTIONS

Combines 5 wordings of this item as funds reported it.

100% fund support · no official result

FOR 95%

The 105 asset managers below cast 100% of the shares they voted on this item FOR (14,300,898 for, 0 against).

FOR: 14,300,898 (94.6%)ABSTAIN: 813,262 (5.4%)

Largest asset managers voting on “Election of Directors: Tzu-Yin Chiu, Ph.D.” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Abstain	Vote
Vanguard	4,175,453	0	For
BlackRock	3,688,908	0	For
PRIMECAP Odyssey Funds	945,946	0	For
Fidelity	857,529	0	For
Dimensional	563,421	0	For
State Street	4,560	500,671	Abstain
Charles Schwab	429,684	0	For
T. Rowe Price	350,227	0	For
American Century	286,999	0	For
TIAA	270,175	0	For
Columbia Threadneedle	214,266	0	For
OBERWEIS FUNDS	201,829	0	For
Calvert	192,688	0	For
Managed Portfolio Series	179,477	0	For
Invesco	165,529	0	For
Direxion Shares ETF Trust	163,211	0	For
MFS	0	155,541	Abstain
Jackson National	153,746	0	For
Equitable	90,217	0	For
Goldman Sachs	83,018	0	For
Putnam	74,415	0	For
Voya	0	73,933	Abstain
Brighthouse	64,477	8,355	For
Bridge Builder Trust	25,837	42,985	Abstain
Royce	65,878	0	For

Showing the 25 largest of 105 asset managers. See all 105 in the interactive database.

13. Advisory Vote to Ratify Named Executive Officers' Compensation

SECTION 14A SAY-ON-PAY VOTES

99.7% fund support · no official result

FOR 99.7%

The 10 asset managers below cast 99.7% of the shares they voted on this item FOR (486,583 for, 982 against).

FOR: 486,583 (99.8%)AGAINST: 982 (0.2%)

Largest asset managers voting on “Advisory Vote to Ratify Named Executive Officers' Compensation” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Against	Vote
JPMorgan	197,006	0	For
PARADIGM CAPITAL MANAGEMENT INC/NY	187,108	0	For
PARADIGM FUNDS	58,000	0	For
Empower	24,284	0	For
TD ASSET MANAGEMENT INC	14,863	0	For
ALGERT GLOBAL LLC	3,853	0	For
TIMOTHY PLAN	1,019	0	For
NORDEA INVESTMENT MANAGEMENT AB	0	982	Against
Empirical Financial Services, LLC d.b.a. Empirical Wealth Ma	450	0	For
OARSMAN CAPITAL, INC.	0	0	--

14. Election of Directors

DIRECTOR ELECTIONS

All nominees (reported as one line). These filers reported the election of directors as a single line covering every nominee. It is not attributed to any one director, and no share total is shown for it.

100% fund support · no official result

FOR 100%

The 5 asset managers below cast 100% of the shares they voted on this item FOR.

FOR: 100.0%

Largest asset managers voting on “Election of Directors” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Vote
Northern Lights Fund Trust IV	17,628	For
FIRSTHAND FUNDS	5,000	For
ZIMMERMANN INVESTMENT MANAGEMENT & PLANNING LLC	868	For
Decatur Capital Management, Inc.	17	For
Starboard	0	--

15. DIRECTOR

DIRECTOR ELECTIONS

100% fund support · no official result

FOR 100%

The 4 asset managers below cast 100% of the shares they voted on this item FOR (2,770 for, 0 against).

FOR: 2,770 (100.0%)

Largest asset managers voting on “DIRECTOR” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Vote
Gabelli	1,600	For
TIMOTHY PLAN	1,019	For
SYNTAX ETF TRUST	102	For
Boltwood Capital Management	49	For

16. Ratify Ernst & Young LLP as Auditors

AUDIT-RELATED

100% fund support · no official result

FOR 100%

The 3 asset managers below cast 100% of the shares they voted on this item FOR (83,303 for, 0 against).

FOR: 83,303 (100.0%)

Largest asset managers voting on “Ratify Ernst & Young LLP as Auditors” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Vote
PARADIGM FUNDS	58,000	For
Empower	24,284	For
TIMOTHY PLAN	1,019	For

17. Amend Certificate of Incorporation to Reflect New Delaware Law Provisions Regarding Officer Exculpation

CORPORATE GOVERNANCE

100% fund support · no official result

FOR 100%

The 3 asset managers below cast 100% of the shares they voted on this item FOR (83,303 for, 0 against).

FOR: 83,303 (100.0%)

Largest asset managers voting on “Amend Certificate of Incorporation to Reflect New Delaware Law Provisions Regarding Officer Exculpation” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Vote
PARADIGM FUNDS	58,000	For
Empower	24,284	For
TIMOTHY PLAN	1,019	For

18. 14A Executive Compensation

DIRECTOR ELECTIONS

100% fund support · no official result

FOR 100%

The 2 asset managers below cast 100% of the shares they voted on this item FOR (592 for, 0 against).

FOR: 592 (100.0%)

Largest asset managers voting on “14A Executive Compensation” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Against	Abstain	Withheld	Vote
ZIMMERMANN INVESTMENT MANAGEMENT & PLANNING LLC	400	0	0	0	For
TOWNSEND ASSET MANAGEMENT CORP /NC/ /ADV	192	0	0	0	For

19. Say on Pay - An advisory vote on the approval of executive H

SECTION 14A SAY-ON-PAY VOTESSECTION 14A SAY-ON-PAY VOTESSECTION 14A SAY-ON-PAY VOTESSECTION 14A SAY-ON-PAY VOTES

Combines 2 wordings of this item as funds reported it.

100% fund support · no official result

FOR 100%

The 2 asset managers below cast 100% of the shares they voted on this item FOR (10,339 for, 0 against).

FOR: 10,339 (100.0%)

Largest asset managers voting on “Say on Pay - An advisory vote on the approval of executive H” at AXCELIS TECHNOLOGIES INC., 2023-2024
Asset manager	For	Against	Abstain	Withheld	Vote
NORTHERN LIGHTS FUND TRUST II	7,392	0	0	0	For
JAMES ADVANTAGE FUNDS	2,947	0	0	0	For

Largest AXCELIS TECHNOLOGIES INC. shareholders voting in 2023-2024

Ranked by the number of AXCELIS TECHNOLOGIES INC. shares each manager voted on the most widely held ballot item of the 2023-2024 meeting, shown as a share of the 32,605,000 shares outstanding at the time of that meeting.

Top AXCELIS TECHNOLOGIES INC. shareholders by shares voted, 2023-2024
#	Asset manager	% of shares outstanding
1	BlackRock	15.15%
2	Vanguard	13.09%
3	State Street	5.03%
4	PRIMECAP MANAGEMENT CO/CA/	3.11%
5	PRIMECAP Odyssey Funds	2.90%
6	Man Group plc	2.77%
7	Fidelity	2.69%
8	Charles Schwab	2.66%
9	Putnam	2.64%
10	T. Rowe Price	2.50%

Reported AXCELIS TECHNOLOGIES INC. ownership

Positions disclosed to the SEC on Schedules 13D and 13G, Form 13F and the company’s own proxy statement (DEF 14A).

AXCELIS TECHNOLOGIES INC. beneficial owners on record for the 2023-2024 proxy season
Holder	% outstanding	Disclosure
BlackRock	14.92%	13F
Vanguard Group	12.84%	13F
State Street	3.73%	13F
Geode Capital	2.47%	13F
Dimensional Fund Advisors	2.08%	13F
FMR (Fidelity)	1.69%	13F
Goldman Sachs	1.52%	13F
T. Rowe Price	1.42%	13F
Morgan Stanley	1.39%	13F
Charles Schwab	1.35%	13F

Percentages above are of 32,605,000 shares outstanding, as reported by AXCELIS TECHNOLOGIES INC. on its Form 10-Q dated 2024-03-31 (see the filing on EDGAR). This is the count contemporaneous with the 2023-2024 meeting, so the percentages are the ones that were true then, not ones restated against today’s share count.

About this page

Every figure above is derived from filings made with the US Securities and Exchange Commission: Form N-PX, in which registered investment companies and institutional managers disclose how they voted every proxy, and Form 8-K Item 5.07, in which the company reports its own meeting results. Shares outstanding are taken from AXCELIS TECHNOLOGIES INC.’s 10-Q dated 2024-03-31. This page is a static snapshot rebuilt weekly on 02 October 2026; a live search always shows the current data.

At AXCELIS TECHNOLOGIES INC.'s shareholder meeting held 2024-05-09, in the 2023-2024 proxy season, 398 asset managers reported how they voted in their SEC Form N-PX filings, covering 5,046 separate fund positions. Their filings are grouped here into 19 reported items; because filers word the same ballot item differently, that can be more than the number of items on the ballot. AXCELIS TECHNOLOGIES INC.'s own Form 8-K tally for this meeting is published below, but no row in it could be matched to the most widely held item, so this page states no certified outcome for that item. On that item — Say on Pay - An advisory vote on the approval of executive compensation. — the reporting funds cast 92% of the shares they voted in favour (FOR divided by FOR plus AGAINST, the conventional basis for proxy support; abstentions, broker non-votes and unvoted shares are excluded because none of them took a side). That is the aggregate of those managers' own N-PX disclosures, not the company's certified result, and the funds are a subset of all shareholders.

AXCELIS TECHNOLOGIES INC. proxy season coverage: 2023-2024 (this page) · 2024-2025 · 2025-2026.