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Axcelis Technologies, Inc. 2025-2026 Proxy Voting Records

Compiled from SEC Form N-PX filings and Axcelis Technologies, Inc.’s Form 8-K, filed 2026-05-06 (Item 5.07 on EDGAR). Page generated 02 October 2026.

  • 21Reported items
  • 400Asset managers
  • 4,649Fund votes
  • 2026-05-05Main meeting date

Proxy season: 2023-2024 2024-2025 2025-2026

Explore Axcelis Technologies, Inc. in the interactive database Compare manager voting policies

Official 2025-2026 meeting results reported by Axcelis Technologies, Inc.

These tallies are Axcelis Technologies, Inc.’s own, as disclosed to the U.S. Securities and Exchange Commission on Form 8-K, filed 2026-05-06 (Item 5.07, “Submission of Matters to a Vote of Security Holders”). They cover every share voted at the meeting, not just the funds that file Form N-PX. Axcelis Technologies, Inc. reported 2 meetings in this season; each is tabulated separately below, with its own filing.

Axcelis Technologies, Inc. — official shareholder meeting results, meeting held 2026-05-05 (Form 8-K, filed 2026-05-06)
Ballot itemForAgainst AbstainWithheldBroker non-votesOutcome
Proposal 1: At the Annual Meeting, each of the eight nominees for election as directors received the number of votes set forth opposite such nominee's name, constituting a plurality of the votes cast, and therefore such nominee has been duly elected as a direc 24,713,401---- 580,4472,436,760 Majority: yes

Source: Axcelis Technologies, Inc., Form 8-K, filed with the SEC on 2026-05-06 — read the filing on EDGAR.

Axcelis Technologies, Inc. — official shareholder meeting results, meeting held 2026-02-06 (Form 8-K, filed 2026-02-06)
Ballot itemForAgainst AbstainWithheldBroker non-votesOutcome
Proposal 1: The Share Issuance Proposal Approval of the Share Issuance Proposal required the affirmative vote of the holders of a majority of votes cast on the Share Issuance Proposal 24,128,3091,048,20551,598 ---- Majority: yes
Proposal 2: The Adjournment Proposal Approval of the Adjournment Proposal required the affirmative vote of the holders of a majority of votes cast on the Adjournment Proposal 23,376,9081,796,45454,750 ---- Majority: yes

Source: Axcelis Technologies, Inc., Form 8-K, filed with the SEC on 2026-02-06 — read the filing on EDGAR.

How asset managers voted at the Axcelis Technologies, Inc. 2025-2026 meetings

Each item below shows how the 400 asset managers that disclosed a Axcelis Technologies, Inc. vote in their SEC Form N-PX filings actually voted. Share totals are the shares those managers' funds voted, summed across every fund they report. These are reported items, not a count of the ballot: fund filings describe one ballot item in different words. Two descriptions are shown as one item only on evidence — the same text (or one cut short of the other), the same director nominee, or a match to the same row of Axcelis Technologies, Inc.’s own Form 8-K tally — never because they merely read alike. A description that could not be joined that way is listed on its own, so one ballot item can appear more than once.

1. Say on Pay - An advisory vote on the approval of executive compensation.

SECTION 14A SAY-ON-PAY VOTES

Meeting held 2026-05-05.

Combines 4 wordings of this item as funds reported it.

93% fund support · no official result

FOR 93%

The 376 asset managers below cast 93% of the shares they voted on this item FOR (26,803,648 for, 1,986,195 against).

FOR: 26,803,648 (93.1%)AGAINST: 1,986,195 (6.9%)ABSTAIN: 1,711 (0.0%)NOT VOTED: 888 (0.0%)
Largest asset managers voting on “Say on Pay - An advisory vote on the approval of executive compensation.” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard4,209,38418 00For
Fidelity3,377,7960 00For
BlackRock3,001,086285 00For
American Century1,823,5580 00For
State Street1,098,7880 00For
REINHART PARTNERS, LLC.1,009,5970 00For
GEODE CAPITAL MANAGEMENT, LLC959,4980 00For
Amundi0916,831 00Against
BNP Paribas Asset Management Holding S.A.0871,870 00Against
Charles Schwab852,2070 00For
PRIMECAP MANAGEMENT CO/CA/662,3520 00For
PRIMECAP Odyssey Funds619,5860 00For
T. Rowe Price551,8610 00For
John Hancock513,0520 00For
Federated Hermes456,2240 00For
Grantham, Mayo, Van Otterloo & Co. LLC451,5590 00For
Allspring403,1950 00For
Northern Trust319,7680 00For
GMO317,5450 00For
Dimensional298,6760 00For
Managed Portfolio Series292,8450 00For
Boston Partners248,4990 00For
Jackson National247,0980 00For
PRINCIPAL GLOBAL INVESTORS213,3250 00For
Goldman Sachs184,6330 00For

Showing the 25 largest of 376 asset managers. See all 376 in the interactive database.

2. To approve the adjournment of the special meeting, if necessary or appropriate, to solicit additional proxies if there are insufficient votes to adopt the Axcelis Share Issuance Proposal.

CORPORATE GOVERNANCE

Meeting held 2026-02-06.

94% fund support · no official result

FOR 94%

The 105 asset managers below cast 94% of the shares they voted on this item FOR (13,197,450 for, 829,070 against).

FOR: 13,197,450 (93.9%)AGAINST: 829,070 (5.9%)ABSTAIN: 22,214 (0.2%)
Largest asset managers voting on “To approve the adjournment of the special meeting, if necessary or appropriate, to solicit additional proxies ” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,937,7784 00For
BlackRock2,168,0310 00For
Fidelity1,455,7340 00For
American Century815,0760 00For
PRIMECAP Odyssey Funds621,9860 00For
State Street8,331449,517 00Against
Invesco411,1960 00For
Charles Schwab387,5830 00For
Dimensional301,3970 00For
T. Rowe Price0286,045 00Against
Managed Portfolio Series277,8450 00For
Jackson National244,0980 00For
Federated Hermes200,4460 00For
GMO197,2720 00For
Allspring192,7290 00For
Bridge Builder Trust171,6850 00For
BOSTON TRUST WALDEN FUNDS160,7300 00For
FIRST EAGLE FUNDS119,4120 00For
Victory Capital104,0880 00For
First Trust87,4000 00For
Brighthouse48,56336,617 00For
Goldman Sachs80,6890 00For
Royce75,5530 00For
Columbia Threadneedle75,5190 00For
Northern Trust73,8790 00For

Showing the 25 largest of 105 asset managers. See all 105 in the interactive database.

3. PROPOSAL TO RATIFY INDEPENDENT PUBLIC ACCOUNTING FIRM.

AUDIT-RELATED

Meeting held 2026-05-05.

Combines 2 wordings of this item as funds reported it.

99.8% fund support · no official result

FOR 99.8%

The 102 asset managers below cast 99.8% of the shares they voted on this item FOR (14,053,118 for, 25,373 against).

FOR: 14,053,118 (99.8%)AGAINST: 25,373 (0.2%)ABSTAIN: 1,045 (0.0%)
Largest asset managers voting on “PROPOSAL TO RATIFY INDEPENDENT PUBLIC ACCOUNTING FIRM.” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,949,1475,791 00For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,64530 00For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA67,0860 00For
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

4. Election of Directors: Gregory B. Graves

DIRECTOR ELECTIONS

Meeting held 2026-05-05.

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.9%

The 102 asset managers below cast 100% of the shares they voted on this item FOR (14,103,774 for, 0 against).

FOR: 14,103,774 (100.0%)ABSTAIN: 1,055 (0.0%)
Largest asset managers voting on “Election of Directors: Gregory B. Graves” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,954,9280 100For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6750 00For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA67,0860 00For
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

5. Election of Directors: Jeanne Quirk

DIRECTOR ELECTIONS

Meeting held 2026-05-05.

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 94%

The 102 asset managers below cast 100% of the shares they voted on this item FOR (13,322,895 for, 0 against).

FOR: 13,322,895 (94.5%)ABSTAIN: 781,935 (5.5%)
Largest asset managers voting on “Election of Directors: Jeanne Quirk” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,949,1520 5,7870For
BlackRock2,170,2600 64,0330For
Fidelity2,091,7170 5,8470For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street7,7550 470,9200Abstain
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle00 69,2420Abstain
Equitable45,7870 22,4910For
TIAA00 67,0860Abstain
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

6. Election of Directors: John T. Kurtzweil

DIRECTOR ELECTIONS

Meeting held 2026-05-05.

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.4%

The 102 asset managers below cast 100% of the shares they voted on this item FOR (14,022,548 for, 0 against).

FOR: 14,022,548 (99.4%)ABSTAIN: 82,281 (0.6%)
Largest asset managers voting on “Election of Directors: John T. Kurtzweil” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,954,9190 190For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6450 300For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA00 67,0860Abstain
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

7. Election of Directors: Jorge Titinger

DIRECTOR ELECTIONS

Meeting held 2026-05-05.

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.9%

The 102 asset managers below cast 100% of the shares they voted on this item FOR (14,091,021 for, 0 against).

FOR: 14,091,021 (99.9%)ABSTAIN: 13,808 (0.1%)
Largest asset managers voting on “Election of Directors: Jorge Titinger” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,954,9350 30For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6750 00For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA67,0860 00For
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

8. Election of Directors: Necip Sayiner, Ph.D.

DIRECTOR ELECTIONS

Meeting held 2026-05-05.

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.9%

The 102 asset managers below cast 100% of the shares they voted on this item FOR (14,103,781 for, 0 against).

FOR: 14,103,781 (100.0%)ABSTAIN: 1,048 (0.0%)
Largest asset managers voting on “Election of Directors: Necip Sayiner, Ph.D.” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,954,9350 30For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6750 00For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA67,0860 00For
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

9. Election of Directors: Russell J. Low, Ph.D.

DIRECTOR ELECTIONS

Meeting held 2026-05-05.

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.9%

The 102 asset managers below cast 100% of the shares they voted on this item FOR (14,103,764 for, 0 against).

FOR: 14,103,764 (100.0%)ABSTAIN: 1,066 (0.0%)
Largest asset managers voting on “Election of Directors: Russell J. Low, Ph.D.” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,954,9350 30For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6570 180For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA67,0860 00For
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

10. Election of Directors: Thomas St. Dennis

DIRECTOR ELECTIONS

Meeting held 2026-05-05.

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.3%

The 102 asset managers below cast 100% of the shares they voted on this item FOR (14,017,668 for, 0 against).

FOR: 14,017,668 (99.4%)ABSTAIN: 87,161 (0.6%)
Largest asset managers voting on “Election of Directors: Thomas St. Dennis” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,954,9190 190For
BlackRock2,234,2930 00For
Fidelity2,097,5640 00For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6450 300For
Charles Schwab403,8350 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Federated Hermes194,0360 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA00 67,0860Abstain
Principal Exchange-Traded Funds61,0550 00For

Showing the 25 largest of 102 asset managers. See all 102 in the interactive database.

11. To approve the issuance of shares of Axcelis Technologies, Inc. ("Axcelis") common stock (the "Axcelis Share Issuance Proposal") pursuant to the Agreement and Plan of Merger, dated as of September 30, 2025, by and among Axcelis, Victory Merger Sub, Inc., a wholly owned subsidiary of Axcelis, and Veeco Instruments Inc.

EXTRAORDINARY TRANSACTIONS

Meeting held 2026-02-06.

Combines 2 wordings of this item as funds reported it.

99% fund support · no official result

FOR 98%

The 94 asset managers below cast 99% of the shares they voted on this item FOR (13,133,256 for, 198,472 against).

FOR: 13,133,256 (98.3%)AGAINST: 198,472 (1.5%)ABSTAIN: 22,214 (0.2%)
Largest asset managers voting on “To approve the issuance of shares of Axcelis Technologies, Inc. ("Axcelis") common stock (the "Axcelis Share I” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,931,6833 00For
BlackRock2,168,0310 00For
Fidelity1,455,7340 00For
American Century815,0760 00For
PRIMECAP Odyssey Funds621,9860 00For
State Street457,8480 00For
Invesco411,1960 00For
Dimensional301,3970 00For
T. Rowe Price286,0450 00For
Managed Portfolio Series277,8450 00For
Jackson National244,0980 00For
GMO197,2720 00For
Allspring192,7290 00For
Bridge Builder Trust171,6850 00For
BOSTON TRUST WALDEN FUNDS0160,730 00Against
FIRST EAGLE FUNDS119,4120 00For
Victory Capital104,0880 00For
First Trust87,4000 00For
Brighthouse85,1800 00For
Goldman Sachs80,6890 00For
Royce75,5530 00For
Columbia Threadneedle75,5190 00For
Northern Trust73,8790 00For
Equitable45,7870 22,2140For
TIAA66,6180 00For

Showing the 25 largest of 94 asset managers. See all 94 in the interactive database.

12. Election of Directors: Tzu-Yin Chiu, Ph.D.

DIRECTOR ELECTIONS

Meeting held 2026-05-05.

Combines 6 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.2%

The 92 asset managers below cast 100% of the shares they voted on this item FOR (13,302,585 for, 0 against).

FOR: 13,302,585 (99.3%)ABSTAIN: 94,839 (0.7%)
Largest asset managers voting on “Election of Directors: Tzu-Yin Chiu, Ph.D.” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Vanguard3,941,1880 50For
BlackRock2,170,2600 64,0330For
Fidelity2,091,7170 5,8470For
American Century730,6700 00For
PRIMECAP Odyssey Funds619,5860 00For
State Street478,6750 00For
GMO317,5450 00For
Managed Portfolio Series292,8450 00For
Jackson National247,0980 00For
T. Rowe Price218,7910 00For
Dimensional205,9980 00For
Allspring186,8180 00For
Bridge Builder Trust172,0000 00For
BOSTON TRUST WALDEN FUNDS151,8850 00For
First Trust103,3050 00For
FIRST EAGLE FUNDS87,7320 00For
Royce76,8440 00For
Goldman Sachs73,0210 00For
Northern Trust71,4090 00For
Columbia Threadneedle69,2420 00For
Equitable68,2780 00For
TIAA67,0860 00For
Principal Exchange-Traded Funds61,0550 00For
QUANTITATIVE MASTER SERIES LLC51,3720 00For
RBB FUND, INC.46,1860 00For

Showing the 25 largest of 92 asset managers. See all 92 in the interactive database.

13. Elect QIU Ciyun

DIRECTOR ELECTIONS

Meeting held 2026-05-05.

100% fund support · no official result

FOR 99.8%

The 15 asset managers below cast 100% of the shares they voted on this item FOR (706,361 for, 0 against).

FOR: 706,361 (99.9%)ABSTAIN: 1,045 (0.1%)
Largest asset managers voting on “Elect QIU Ciyun” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Charles Schwab403,8350 00For
Federated Hermes194,0360 00For
PACE SELECT ADVISORS TRUST24,6030 00For
Global X14,2760 00For
Vanguard13,7460 00For
Prudential/PGIM11,5500 00For
TARGET PORTFOLIO TRUST11,2000 00For
Morningstar Funds Trust10,0270 00For
SEI Exchange Traded Funds7,2730 00For
SEI7,1400 00For
Russell Investments4,4930 00For
Venerable Variable Insurance Trust2,3630 00For
Brighthouse00 1,0450Abstain
NEW COVENANT FUNDS9510 00For
Nationwide8680 00For

14. To approve the issuance of shares of Axcelis Technologies, Inc.'s ("Axcelis") common stock (the "Axcelis Share Issuance Proposal") pursuant to the Agreement and Plan of Merger, dated as of September 30, 2025, by and among Axcelis, Victory Merger Sub, Inc., a wholly owned subsidiary of Axcelis, and Veeco Instruments Inc.

EXTRAORDINARY TRANSACTIONS

Meeting held 2026-02-06.

Combines 2 wordings of this item as funds reported it.

100% fund support · no official result

FOR 100%

The 13 asset managers below cast 100% of the shares they voted on this item FOR (692,762 for, 0 against).

FOR: 692,762 (100.0%)
Largest asset managers voting on “To approve the issuance of shares of Axcelis Technologies, Inc.'s ("Axcelis") common stock (the "Axcelis Share” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Charles Schwab387,5830 00For
Federated Hermes200,4460 00For
SEI26,3200 00For
PACE SELECT ADVISORS TRUST14,8380 00For
Global X14,3470 00For
Prudential/PGIM11,5500 00For
TARGET PORTFOLIO TRUST10,7000 00For
Morningstar Funds Trust10,0270 00For
SEI Exchange Traded Funds6,5770 00For
Vanguard6,0970 00For
Venerable Variable Insurance Trust2,4580 00For
NEW COVENANT FUNDS9510 00For
Nationwide8680 00For

15. Advisory Vote to Ratify Named Executive Officers' Compensation

SECTION 14A SAY-ON-PAY VOTES

Meeting held 2026-05-05.

100% fund support · no official result

FOR 100%

The 8 asset managers below cast 100% of the shares they voted on this item FOR (80,766 for, 0 against).

FOR: 80,766 (100.0%)
Largest asset managers voting on “Advisory Vote to Ratify Named Executive Officers' Compensation” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
GLOBEFLEX CAPITAL L P44,4550 00For
Empower23,1650 00For
Empirical Financial Services, LLC d.b.a. Empirical Wealth Ma7,1980 00For
CLEARWATER INVESTMENT TRUST3,6730 00For
APG Asset Management US Inc.2,0090 00For
Coyle Financial Counsel LLC1600 00For
Cornerstone Investment Partners, LLC1040 00For
WHITENER CAPITAL MANAGEMENT, INC.20 00For

16. Adjourn Meeting

EXTRAORDINARY TRANSACTIONS

Meeting held 2026-02-06.

100% fund support · no official result

FOR 100%

The 3 asset managers below cast 100% of the shares they voted on this item FOR (46,868 for, 0 against).

FOR: 46,868 (100.0%)
Largest asset managers voting on “Adjourn Meeting” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Empower23,1650 00For
JPMorgan20,0300 00For
CLEARWATER INVESTMENT TRUST3,6730 00For

17. Issue Shares in Connection with Merger

EXTRAORDINARY TRANSACTIONSMajority of the votes cast: yes

Meeting held 2026-02-06.

96% Majority: yes · of votes cast

FOR 96%
FOR: 24,128,309AGAINST: 1,048,205

Axcelis Technologies, Inc.’s own tally for this item (“Proposal 1: The Share Issuance Proposal Approval of the Share Issuance Proposal required the affirmative vote of the holders of a majority of votes cast on the Share Issuance Proposal”): 24,128,309 for, 1,048,205 against, per its Form 8-K filed 2026-02-06 (Item 5.07). FOR was more than half of the votes cast. Whether the item passed is for the filing to say; its statement has not been read for this item. Of all 30,733,897 outstanding shares: 79% for, 3% against (82% of the company cast a for/against vote).

The 3 asset managers below cast 100% of the shares they voted on this item FOR (46,868 for, 0 against).

FOR 100%
FOR: 46,868 (100.0%)
Largest asset managers voting on “Issue Shares in Connection with Merger” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Empower23,1650 00For
JPMorgan20,0300 00For
CLEARWATER INVESTMENT TRUST3,6730 00For

18. TO APPROVE THE ISSUANCE OF SHARES OF AXCELIS TECHNOLOGIES, INC. (AXCELIS&QUOT) COMMON STOCK (THE &QUOTAXCELIS SHARE ISSUANCE PROPOSAL&QUOT) PURSUANT TO THE AGREEMENT AND PLAN OF MERGER, DATED AS OF SEPTEMBER 30, 2025, BY AND AMONG AXCELIS, VICTORY MERGER SUB, INC., A WHOLLY OWNED SUBSIDIARY OF AXCELIS, AND VEECO INSTRUMENTS INC. &QUOT

EXTRAORDINARY TRANSACTIONS

Meeting held 2026-02-06.

100% fund support · no official result

FOR 100%

The 3 asset managers below cast 100% of the shares they voted on this item FOR (5,442 for, 0 against).

FOR: 5,442 (100.0%)
Largest asset managers voting on “TO APPROVE THE ISSUANCE OF SHARES OF AXCELIS TECHNOLOGIES, INC. (AXCELIS&QUOT) COMMON STOCK (THE &QUOTAXCELIS ” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
TIMOTHY PLAN4,9980 00For
RBB Fund Trust2890 00For
Advisors' Inner Circle Fund III1550 00For

19. An advisory vote on the approval of executive compensation.

SECTION 14A SAY-ON-PAY VOTES

Meeting held 2026-05-05.

100% fund support · no official result

FOR 100%

The 2 asset managers below cast 100% of the shares they voted on this item FOR (93 for, 0 against).

FOR: 93 (100.0%)
Largest asset managers voting on “An advisory vote on the approval of executive compensation.” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Blackstone Inc.920 00For
WHITEBOX ADVISORS LLC10 00For

20. Ratify Ernst & Young LLP as Auditors

AUDIT-RELATED

Meeting held 2026-05-05.

100% fund support · no official result

FOR 100%

The 2 asset managers below cast 100% of the shares they voted on this item FOR (26,838 for, 0 against).

FOR: 26,838 (100.0%)
Largest asset managers voting on “Ratify Ernst & Young LLP as Auditors” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Empower23,1650 00For
CLEARWATER INVESTMENT TRUST3,6730 00For

21. Say on Pay

SECTION 14A SAY-ON-PAY VOTES

Meeting held 2026-05-05.

100% fund support · no official result

FOR 100%

The 2 asset managers below cast 100% of the shares they voted on this item FOR (1,050 for, 0 against).

FOR: 1,050 (100.0%)
Largest asset managers voting on “Say on Pay” at Axcelis Technologies, Inc., 2025-2026
Asset managerForAgainst AbstainWithheldVote
Empower1,0400 00For
Arista Wealth Management, LLC100 00For

Largest Axcelis Technologies, Inc. shareholders voting in 2025-2026

Ranked by the number of Axcelis Technologies, Inc. shares each manager voted on the most widely held ballot item of the 2025-2026 meeting, shown as a share of the 30,733,897 shares outstanding at the time of that meeting.

Top Axcelis Technologies, Inc. shareholders by shares voted, 2025-2026
#Asset manager % of shares outstanding
1Vanguard 13.70%
2Fidelity 10.99%
3BlackRock 9.77%
4American Century 5.93%
5State Street 3.58%
6REINHART PARTNERS, LLC. 3.28%
7GEODE CAPITAL MANAGEMENT, LLC 3.12%
8Amundi 2.98%
9BNP Paribas Asset Management Holding S.A. 2.84%
10Charles Schwab 2.77%

Reported Axcelis Technologies, Inc. ownership

Positions disclosed to the SEC on Schedules 13D and 13G, Form 13F and the company’s own proxy statement (DEF 14A).

Axcelis Technologies, Inc. beneficial owners on record for the 2025-2026 proxy season
Holder % outstanding Disclosure
BlackRock 16.06% 13F
Vanguard Group 13.41% 13F
Vanguard Portfolio Management 8.14% 13G
FMR (Fidelity) 7.91% 13F
State Street 3.87% 13F
REINHART PARTNERS, LLC. 3.02% 13G
Dimensional Fund Advisors 2.75% 13F
D.E. Shaw 1.77% 13F
Goldman Sachs 1.62% 13F
Charles Schwab 1.45% 13F

Percentages above are of 30,733,897 shares outstanding, as reported by Axcelis Technologies, Inc. on its Form 10-Q dated 2026-05-05 (see the filing on EDGAR). This is the count contemporaneous with the 2025-2026 meeting, so the percentages are the ones that were true then, not ones restated against today’s share count.

About this page

Every figure above is derived from filings made with the US Securities and Exchange Commission: Form N-PX, in which registered investment companies and institutional managers disclose how they voted every proxy, and Form 8-K Item 5.07, in which the company reports its own meeting results. Shares outstanding are taken from Axcelis Technologies, Inc.’s 10-Q dated 2026-05-05. This page is a static snapshot rebuilt weekly on 02 October 2026; a live search always shows the current data.

At Axcelis Technologies, Inc.'s 2 shareholder meetings in the 2025-2026 proxy season (held 2026-02-06 and 2026-05-05), 400 asset managers reported how they voted in their SEC Form N-PX filings, covering 4,649 separate fund positions. Their filings are grouped here into 21 reported items; because filers word the same ballot item differently, that can be more than the number of items on the ballot. Axcelis Technologies, Inc.'s own Form 8-K tally for this meeting is published below, but no row in it could be matched to the most widely held item, so this page states no certified outcome for that item. On that item — Say on Pay - An advisory vote on the approval of executive compensation. — the reporting funds cast 93% of the shares they voted in favour (FOR divided by FOR plus AGAINST, the conventional basis for proxy support; abstentions, broker non-votes and unvoted shares are excluded because none of them took a side). That is the aggregate of those managers' own N-PX disclosures, not the company's certified result, and the funds are a subset of all shareholders.

Axcelis Technologies, Inc. proxy season coverage: 2023-2024 · 2024-2025 · 2025-2026 (this page).