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AXCELIS TECHNOLOGIES INC. 2024-2025 Proxy Voting Records

Compiled from SEC Form N-PX filings and AXCELIS TECHNOLOGIES INC.’s Form 8-K, filed 2025-05-08 (Item 5.07 on EDGAR). Page generated 02 October 2026.

16Reported items
351Asset managers
3,927Fund votes
2025-05-07Meeting date

Proxy season: 2023-2024 2024-2025 2025-2026

Explore AXCELIS TECHNOLOGIES INC. in the interactive database Compare manager voting policies

Official 2024-2025 meeting results reported by AXCELIS TECHNOLOGIES INC.

These tallies are AXCELIS TECHNOLOGIES INC.’s own, as disclosed to the U.S. Securities and Exchange Commission on Form 8-K, filed 2025-05-08 (Item 5.07, “Submission of Matters to a Vote of Security Holders”). They cover every share voted at the meeting, not just the funds that file Form N-PX.

AXCELIS TECHNOLOGIES INC. — official shareholder meeting results, meeting held 2025-05-07
Ballot item	For	Against	Abstain	Withheld	Broker non-votes	Outcome
Proposal 1: At the Annual Meeting, each of the eight nominees for election as directors received the number of votes set forth opposite the nominee's name, constituting a plurality of the votes cast, and therefore such nominee has been duly elected as a direct	23,767,915	--	--	1,868,681	3,149,557	Majority: yes

Source: AXCELIS TECHNOLOGIES INC., Form 8-K, filed with the SEC on 2025-05-08 — read the filing on EDGAR.

How asset managers voted at the AXCELIS TECHNOLOGIES INC. 2024-2025 meeting

Each item below shows how the 351 asset managers that disclosed a AXCELIS TECHNOLOGIES INC. vote in their SEC Form N-PX filings actually voted. Share totals are the shares those managers' funds voted, summed across every fund they report. These are reported items, not a count of the ballot: fund filings describe one ballot item in different words. Two descriptions are shown as one item only on evidence — the same text (or one cut short of the other), the same director nominee, or a match to the same row of AXCELIS TECHNOLOGIES INC.’s own Form 8-K tally — never because they merely read alike. A description that could not be joined that way is listed on its own, so one ballot item can appear more than once.

1. Say on Pay - An advisory vote on the approval of executive compensation.

SECTION 14A SAY-ON-PAY VOTES

Combines 5 wordings of this item as funds reported it.

84% fund support · no official result

FOR 84%AGAINST 16%

The 339 asset managers below cast 84% of the shares they voted on this item FOR (24,427,776 for, 4,727,571 against).

FOR: 24,427,776 (83.5%)AGAINST: 4,727,571 (16.2%)ABSTAIN: 85,929 (0.3%)NOT VOTED: 1,461 (0.0%)

Largest asset managers voting on “Say on Pay - An advisory vote on the approval of executive compensation.” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Against	Vote
Vanguard	4,514,309	1,029	For
BlackRock	3,964,714	285	For
American Century	0	2,995,929	Against
State Street	1,585,416	0	For
Fidelity	1,034,837	0	For
REINHART PARTNERS, LLC.	906,774	73,058	For
T. Rowe Price	934,519	0	For
GEODE CAPITAL MANAGEMENT, LLC	918,571	0	For
PRIMECAP MANAGEMENT CO/CA/	895,296	0	For
PRIMECAP Odyssey Funds	838,316	0	For
BNP Paribas Asset Management Holding S.A.	0	787,054	Against
Charles Schwab	679,112	0	For
Pacer Funds Trust	612,121	0	For
Dimensional	524,389	0	For
Amundi	0	472,521	Against
Boston Trust Walden Co	407,138	0	For
Northern Trust	385,638	0	For
Managed Portfolio Series	367,569	0	For
Grantham, Mayo, Van Otterloo & Co. LLC	337,518	0	For
Federated Hermes	331,222	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Royce	286,392	0	For
Jackson National	285,346	0	For
Boston Partners	271,953	0	For
MELLON INVESTMENTS Corp	217,936	0	For

Showing the 25 largest of 339 asset managers. See all 339 in the interactive database.

2. Election of Directors: Gregory B. Graves

DIRECTOR ELECTIONS

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.4%

The 101 asset managers below cast 100% of the shares they voted on this item FOR (16,476,991 for, 0 against).

FOR: 16,476,991 (99.4%)ABSTAIN: 96,807 (0.6%)

Largest asset managers voting on “Election of Directors: Gregory B. Graves” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Vote
Vanguard	4,387,286	2	For
BlackRock	2,973,814	0	For
American Century	1,746,590	0	For
Fidelity	980,402	0	For
PRIMECAP Odyssey Funds	838,316	0	For
Pacer Funds Trust	612,121	0	For
State Street	470,340	0	For
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
Managed Portfolio Series	367,569	0	For
Charles Schwab	327,563	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Jackson National	285,346	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Federated Hermes	163,550	0	For
Bridge Builder Trust	111,504	0	For
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
Harbor Funds II	94,048	0	For
Equitable	87,955	0	For
TIAA	87,494	0	For
BUFFALO FUNDS	0	79,940	Abstain
Columbia Threadneedle	69,855	0	For
Brighthouse	59,837	5,989	For

Showing the 25 largest of 101 asset managers. See all 101 in the interactive database.

3. Election of Directors: Jeanne Quirk

DIRECTOR ELECTIONS

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 93%

The 101 asset managers below cast 100% of the shares they voted on this item FOR (15,425,204 for, 0 against).

FOR: 15,425,204 (93.1%)ABSTAIN: 1,148,594 (6.9%)

Largest asset managers voting on “Election of Directors: Jeanne Quirk” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Vote
Vanguard	4,387,283	5	For
BlackRock	2,951,841	21,973	For
American Century	1,746,590	0	For
Fidelity	970,185	10,217	For
PRIMECAP Odyssey Funds	838,316	0	For
Pacer Funds Trust	612,121	0	For
State Street	6,953	463,387	Abstain
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
Managed Portfolio Series	367,569	0	For
Charles Schwab	0	327,563	Abstain
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Jackson National	285,346	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Federated Hermes	163,550	0	For
Bridge Builder Trust	111,504	0	For
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
Harbor Funds II	94,048	0	For
Equitable	87,955	0	For
TIAA	0	87,494	Abstain
BUFFALO FUNDS	0	79,940	Abstain
Columbia Threadneedle	0	69,855	Abstain
Brighthouse	59,837	5,989	For

Showing the 25 largest of 101 asset managers. See all 101 in the interactive database.

4. Election of Directors: John T. Kurtzweil

DIRECTOR ELECTIONS

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 98%

The 101 asset managers below cast 100% of the shares they voted on this item FOR (16,300,691 for, 0 against).

FOR: 16,300,691 (98.4%)ABSTAIN: 273,107 (1.6%)

Largest asset managers voting on “Election of Directors: John T. Kurtzweil” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Vote
Vanguard	4,387,283	5	For
BlackRock	2,951,841	21,973	For
American Century	1,746,590	0	For
Fidelity	970,185	10,217	For
PRIMECAP Odyssey Funds	838,316	0	For
Pacer Funds Trust	612,121	0	For
State Street	470,340	0	For
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
Managed Portfolio Series	367,569	0	For
Charles Schwab	327,563	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Jackson National	285,346	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Federated Hermes	163,550	0	For
Bridge Builder Trust	111,504	0	For
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
Harbor Funds II	94,048	0	For
Equitable	87,955	0	For
TIAA	0	87,494	Abstain
BUFFALO FUNDS	0	79,940	Abstain
Columbia Threadneedle	69,855	0	For
Brighthouse	59,837	5,989	For

Showing the 25 largest of 101 asset managers. See all 101 in the interactive database.

5. Election of Directors: Jorge Titinger

DIRECTOR ELECTIONS

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99%

The 101 asset managers below cast 100% of the shares they voted on this item FOR (16,405,084 for, 0 against).

FOR: 16,405,084 (99.0%)ABSTAIN: 168,714 (1.0%)

Largest asset managers voting on “Election of Directors: Jorge Titinger” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Vote
Vanguard	4,387,284	4	For
BlackRock	2,973,814	0	For
American Century	1,746,590	0	For
Fidelity	980,402	0	For
PRIMECAP Odyssey Funds	838,316	0	For
Pacer Funds Trust	612,121	0	For
State Street	470,340	0	For
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
Managed Portfolio Series	367,569	0	For
Charles Schwab	327,563	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Jackson National	285,346	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Federated Hermes	163,550	0	For
Bridge Builder Trust	95,445	16,059	For
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
Harbor Funds II	94,048	0	For
Equitable	87,955	0	For
TIAA	87,494	0	For
BUFFALO FUNDS	0	79,940	Abstain
Columbia Threadneedle	69,855	0	For
Brighthouse	59,837	5,989	For

Showing the 25 largest of 101 asset managers. See all 101 in the interactive database.

6. Election of Directors: Necip Sayiner, Ph.D.

DIRECTOR ELECTIONS

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.4%

The 101 asset managers below cast 100% of the shares they voted on this item FOR (16,477,867 for, 0 against).

FOR: 16,477,867 (99.4%)ABSTAIN: 95,931 (0.6%)

Largest asset managers voting on “Election of Directors: Necip Sayiner, Ph.D.” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Vote
Vanguard	4,387,286	2	For
BlackRock	2,973,814	0	For
American Century	1,746,590	0	For
Fidelity	980,402	0	For
PRIMECAP Odyssey Funds	838,316	0	For
Pacer Funds Trust	612,121	0	For
State Street	470,340	0	For
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
Managed Portfolio Series	367,569	0	For
Charles Schwab	327,563	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Jackson National	285,346	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Federated Hermes	163,550	0	For
Bridge Builder Trust	111,504	0	For
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
Harbor Funds II	94,048	0	For
Equitable	87,955	0	For
TIAA	87,494	0	For
BUFFALO FUNDS	0	79,940	Abstain
Columbia Threadneedle	69,855	0	For
Brighthouse	59,837	5,989	For

Showing the 25 largest of 101 asset managers. See all 101 in the interactive database.

7. Election of Directors: Russell J. Low, Ph.D.

DIRECTOR ELECTIONS

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 99.4%

The 101 asset managers below cast 100% of the shares they voted on this item FOR (16,487,867 for, 0 against).

FOR: 16,487,867 (99.5%)ABSTAIN: 85,931 (0.5%)

Largest asset managers voting on “Election of Directors: Russell J. Low, Ph.D.” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Vote
Vanguard	4,387,286	2	For
BlackRock	2,973,814	0	For
American Century	1,746,590	0	For
Fidelity	980,402	0	For
PRIMECAP Odyssey Funds	838,316	0	For
Pacer Funds Trust	612,121	0	For
State Street	470,340	0	For
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
Managed Portfolio Series	367,569	0	For
Charles Schwab	327,563	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Jackson National	285,346	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Federated Hermes	163,550	0	For
Bridge Builder Trust	111,504	0	For
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
Harbor Funds II	94,048	0	For
Equitable	87,955	0	For
TIAA	87,494	0	For
BUFFALO FUNDS	0	79,940	Abstain
Columbia Threadneedle	69,855	0	For
Brighthouse	59,837	5,989	For

Showing the 25 largest of 101 asset managers. See all 101 in the interactive database.

8. Election of Directors: Thomas St. Dennis

DIRECTOR ELECTIONS

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 98%

The 101 asset managers below cast 100% of the shares they voted on this item FOR (16,295,951 for, 0 against).

FOR: 16,295,951 (98.3%)ABSTAIN: 277,847 (1.7%)

Largest asset managers voting on “Election of Directors: Thomas St. Dennis” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Vote
Vanguard	4,387,283	5	For
BlackRock	2,951,841	21,973	For
American Century	1,746,590	0	For
Fidelity	970,185	10,217	For
PRIMECAP Odyssey Funds	838,316	0	For
Pacer Funds Trust	612,121	0	For
State Street	470,340	0	For
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
Managed Portfolio Series	367,569	0	For
Charles Schwab	327,563	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Jackson National	285,346	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Federated Hermes	163,550	0	For
Bridge Builder Trust	111,504	0	For
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
Harbor Funds II	94,048	0	For
Equitable	87,955	0	For
TIAA	0	87,494	Abstain
BUFFALO FUNDS	0	79,940	Abstain
Columbia Threadneedle	69,855	0	For
Brighthouse	59,837	5,989	For

Showing the 25 largest of 101 asset managers. See all 101 in the interactive database.

9. Election of Directors: Tzu-Yin Chiu, Ph.D.

DIRECTOR ELECTIONS

Combines 7 wordings of this item as funds reported it.

100% fund support · no official result

FOR 98%

The 101 asset managers below cast 100% of the shares they voted on this item FOR (16,268,180 for, 0 against).

FOR: 16,268,180 (98.2%)ABSTAIN: 305,618 (1.8%)

Largest asset managers voting on “Election of Directors: Tzu-Yin Chiu, Ph.D.” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Abstain	Vote
Vanguard	4,387,284	4	For
BlackRock	2,951,841	21,973	For
American Century	1,746,590	0	For
Fidelity	970,185	10,217	For
PRIMECAP Odyssey Funds	838,316	0	For
Pacer Funds Trust	612,121	0	For
State Street	470,340	0	For
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
Managed Portfolio Series	367,569	0	For
Charles Schwab	327,563	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Jackson National	285,346	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Federated Hermes	163,550	0	For
Bridge Builder Trust	111,504	0	For
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
Harbor Funds II	94,048	0	For
Equitable	87,955	0	For
TIAA	0	87,494	Abstain
BUFFALO FUNDS	0	79,940	Abstain
Columbia Threadneedle	69,855	0	For
Brighthouse	59,837	5,989	For

Showing the 25 largest of 101 asset managers. See all 101 in the interactive database.

10. PROPOSAL TO RATIFY INDEPENDENT PUBLIC ACCOUNTING FIRM.

AUDIT-RELATED

99.8% fund support · no official result

FOR 99.3%

The 100 asset managers below cast 99.8% of the shares they voted on this item FOR (16,427,138 for, 24,789 against).

FOR: 16,427,138 (99.3%)AGAINST: 24,789 (0.1%)ABSTAIN: 85,929 (0.5%)

Largest asset managers voting on “PROPOSAL TO RATIFY INDEPENDENT PUBLIC ACCOUNTING FIRM.” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Against	Abstain	Vote
Vanguard	4,386,260	1,028	0	For
BlackRock	2,973,814	0	0	For
American Century	1,746,590	0	0	For
Fidelity	980,402	0	0	For
PRIMECAP Odyssey Funds	838,316	0	0	For
Pacer Funds Trust	612,121	0	0	For
State Street	470,321	19	0	For
Dimensional	450,570	0	0	For
T. Rowe Price	402,156	0	0	For
Managed Portfolio Series	367,569	0	0	For
Charles Schwab	327,563	0	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	0	For
Jackson National	285,346	0	0	For
Royce	242,751	0	0	For
GMO	208,785	0	0	For
Federated Hermes	163,550	0	0	For
Bridge Builder Trust	111,504	0	0	For
Goldman Sachs	109,696	0	0	For
Victory Capital	108,902	0	0	For
Harbor Funds II	94,048	0	0	For
Equitable	87,955	0	0	For
TIAA	87,494	0	0	For
BUFFALO FUNDS	0	0	79,940	Abstain
Columbia Threadneedle	69,855	0	0	For
Brighthouse	59,837	0	5,989	For

Showing the 25 largest of 100 asset managers. See all 100 in the interactive database.

11. Proposal to amend the 2012 Equity Incentive Plan to increase the number of shares reserve for issuance

COMPENSATION

82% fund support · no official result

FOR 82%AGAINST 18%

The 62 asset managers below cast 82% of the shares they voted on this item FOR (8,600,320 for, 1,890,526 against).

FOR: 8,600,320 (82.0%)AGAINST: 1,890,526 (18.0%)

Largest asset managers voting on “Proposal to amend the 2012 Equity Incentive Plan to increase the number of shares reserve for issuance” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Against	Vote
Vanguard	4,384,763	0	For
American Century	0	1,746,590	Against
Fidelity	980,402	0	For
State Street	470,321	19	For
Dimensional	450,570	0	For
T. Rowe Price	402,156	0	For
BOSTON TRUST WALDEN FUNDS	315,216	0	For
Royce	242,751	0	For
GMO	208,785	0	For
Goldman Sachs	109,696	0	For
Victory Capital	108,902	0	For
Equitable	87,955	0	For
TIAA	0	87,494	Against
Columbia Threadneedle	69,855	0	For
Brighthouse	59,837	0	For
Janus Detroit Street Trust	55,215	0	For
MFS	50,826	0	For
Managed Portfolio Series	49,724	0	For
Voya	42,652	0	For
Lincoln Financial	40,826	0	For
Nuveen	0	39,857	Against
BNY Mellon	38,343	0	For
RBB FUND, INC.	37,736	0	For
HOMESTEAD FUNDS INC	34,200	0	For
Principal	33,312	0	For

Showing the 25 largest of 62 asset managers. See all 62 in the interactive database.

12. PROPOSAL TO AMEND THE 2012 EQUITY INCENTIVE PLAN TO INCREASE THE NUMBER OF SHARES RESERVED FOR ISSUANCE.

COMPENSATION

98% fund support · no official result

FOR 97%

The 45 asset managers below cast 98% of the shares they voted on this item FOR (5,856,454 for, 105,543 against).

FOR: 5,856,454 (96.8%)AGAINST: 105,543 (1.7%)ABSTAIN: 85,929 (1.4%)

Largest asset managers voting on “PROPOSAL TO AMEND THE 2012 EQUITY INCENTIVE PLAN TO INCREASE THE NUMBER OF SHARES RESERVED FOR ISSUANCE.” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Against	Abstain	Vote
BlackRock	2,973,814	0	0	For
PRIMECAP Odyssey Funds	838,316	0	0	For
Pacer Funds Trust	612,121	0	0	For
Charles Schwab	327,563	0	0	For
Managed Portfolio Series	317,845	0	0	For
Jackson National	285,346	0	0	For
Federated Hermes	163,550	0	0	For
Bridge Builder Trust	22,387	89,117	0	Against
Harbor Funds II	94,048	0	0	For
BUFFALO FUNDS	0	0	79,940	Abstain
QUANTITATIVE MASTER SERIES LLC	45,825	0	0	For
JPMorgan	35,418	0	0	For
Global X	19,130	0	0	For
Advisor Managed Portfolios	17,883	0	0	For
SEI	14,308	0	0	For
MASTER INVESTMENT PORTFOLIO	13,316	0	0	For
Allianz	11,650	0	0	For
John Hancock	11,610	0	0	For
ETF Series Solutions	0	9,666	0	Against
Harbor ETF Trust	9,161	0	0	For
NORTHERN LIGHTS FUND TRUST II	7,792	0	0	For
Prudential/PGIM	7,100	0	0	For
Gabelli	0	6,422	0	Against
Brighthouse	0	0	5,989	Abstain
Russell Investments	4,470	0	0	For

Showing the 25 largest of 45 asset managers. See all 45 in the interactive database.

13. Advisory Vote to Ratify Named Executive Officers' Compensation

SECTION 14A SAY-ON-PAY VOTES

100% fund support · no official result

FOR 100%

The 8 asset managers below cast 100% of the shares they voted on this item FOR (290,603 for, 0 against).

FOR: 290,603 (100.0%)

Largest asset managers voting on “Advisory Vote to Ratify Named Executive Officers' Compensation” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Vote
PARADIGM FUNDS	98,000	For
PARADIGM CAPITAL MANAGEMENT INC/NY	84,100	For
JPMorgan	64,897	For
Empower	26,663	For
GuideStone	15,701	For
ESSEX INVESTMENT MANAGEMENT CO LLC	625	For
Empirical Financial Services, LLC d.b.a. Empirical Wealth Ma	615	For
WHITENER CAPITAL MANAGEMENT, INC.	2	For

14. Ratify Ernst & Young LLP as Auditors

AUDIT-RELATED

100% fund support · no official result

FOR 100%

The 3 asset managers below cast 100% of the shares they voted on this item FOR (140,364 for, 0 against).

FOR: 140,364 (100.0%)

Largest asset managers voting on “Ratify Ernst & Young LLP as Auditors” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Vote
PARADIGM FUNDS	98,000	For
Empower	26,663	For
GuideStone	15,701	For

15. Amend Omnibus Stock Plan

CAPITAL STRUCTURE

100% fund support · no official result

FOR 100%

The 3 asset managers below cast 100% of the shares they voted on this item FOR (140,364 for, 0 against).

FOR: 140,364 (100.0%)

Largest asset managers voting on “Amend Omnibus Stock Plan” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Vote
PARADIGM FUNDS	98,000	For
Empower	26,663	For
GuideStone	15,701	For

16. 14A Executive Compensation

SECTION 14A SAY-ON-PAY VOTES

100% fund support · no official result

FOR 68%NOT VOTED 32%

The 2 asset managers below cast 100% of the shares they voted on this item FOR (4,634 for, 0 against).

FOR: 4,634 (67.8%)NOT VOTED: 2,205 (32.2%)

Largest asset managers voting on “14A Executive Compensation” at AXCELIS TECHNOLOGIES INC., 2024-2025
Asset manager	For	Against	Abstain	Withheld	Vote
Focus Partners Wealth	4,634	0	0	0	For
LEAVELL INVESTMENT MANAGEMENT, INC.	0	0	0	0	Not Voted

Largest AXCELIS TECHNOLOGIES INC. shareholders voting in 2024-2025

Ranked by the number of AXCELIS TECHNOLOGIES INC. shares each manager voted on the most widely held ballot item of the 2024-2025 meeting, shown as a share of the 32,129,000 shares outstanding at the time of that meeting.

Top AXCELIS TECHNOLOGIES INC. shareholders by shares voted, 2024-2025
#	Asset manager	% of shares outstanding
1	Vanguard	14.05%
2	BlackRock	12.34%
3	American Century	9.32%
4	State Street	4.93%
5	Fidelity	3.22%
6	REINHART PARTNERS, LLC.	3.05%
7	T. Rowe Price	2.91%
8	GEODE CAPITAL MANAGEMENT, LLC	2.86%
9	PRIMECAP MANAGEMENT CO/CA/	2.79%
10	PRIMECAP Odyssey Funds	2.61%

Reported AXCELIS TECHNOLOGIES INC. ownership

Positions disclosed to the SEC on Schedules 13D and 13G, Form 13F and the company’s own proxy statement (DEF 14A).

AXCELIS TECHNOLOGIES INC. beneficial owners on record for the 2024-2025 proxy season
Holder	% outstanding	Disclosure
BlackRock	16.62%	13F
Vanguard Group	13.82%	13F
FMR LLC	10.83%	13G
Vanguard Portfolio Management	7.79%	13G
REINHART PARTNERS, LLC.	4.95%	13G
American Century Investment Management, Inc.	4.19%	13G
State Street	3.89%	13F
Dimensional Fund Advisors	2.18%	13F
Goldman Sachs	1.98%	13F
T. Rowe Price	1.64%	13F

Percentages above are of 32,129,000 shares outstanding, as reported by AXCELIS TECHNOLOGIES INC. on its Form 10-Q dated 2025-03-31 (see the filing on EDGAR). This is the count contemporaneous with the 2024-2025 meeting, so the percentages are the ones that were true then, not ones restated against today’s share count.

About this page

Every figure above is derived from filings made with the US Securities and Exchange Commission: Form N-PX, in which registered investment companies and institutional managers disclose how they voted every proxy, and Form 8-K Item 5.07, in which the company reports its own meeting results. Shares outstanding are taken from AXCELIS TECHNOLOGIES INC.’s 10-Q dated 2025-03-31. This page is a static snapshot rebuilt weekly on 02 October 2026; a live search always shows the current data.

At AXCELIS TECHNOLOGIES INC.'s shareholder meeting held 2025-05-07, in the 2024-2025 proxy season, 351 asset managers reported how they voted in their SEC Form N-PX filings, covering 3,927 separate fund positions. Their filings are grouped here into 16 reported items; because filers word the same ballot item differently, that can be more than the number of items on the ballot. AXCELIS TECHNOLOGIES INC.'s own Form 8-K tally for this meeting is published below, but no row in it could be matched to the most widely held item, so this page states no certified outcome for that item. On that item — Say on Pay - An advisory vote on the approval of executive compensation. — the reporting funds cast 84% of the shares they voted in favour (FOR divided by FOR plus AGAINST, the conventional basis for proxy support; abstentions, broker non-votes and unvoted shares are excluded because none of them took a side). That is the aggregate of those managers' own N-PX disclosures, not the company's certified result, and the funds are a subset of all shareholders.

AXCELIS TECHNOLOGIES INC. proxy season coverage: 2023-2024 · 2024-2025 (this page) · 2025-2026.